Miguel Fung

Person

Redwood City, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method of forming film stacks with reduced defects
- Patent number 11,145,504
- Issue date Oct 12, 2021
- Applied Materials, Inc.
- Zhijun Jiang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Nitrogen-free dielectric anti-reflective coating and hardmask
- Patent number 6,927,178
- Issue date Aug 9, 2005
- Applied Materials, Inc.
- Bok Hoen Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
ION IMPLANTATION FOR REDUCED ROUGHNESS OF SILICON NITRIDE
- Publication number 20240332009
- Publication date Oct 3, 2024
- Applied Materials, Inc.
- Qixin Shen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SURFACE ROUGHNESS REDUCTION FOR PHOTONICS USING HIGH-TEMPERATURE IM...
- Publication number 20240255700
- Publication date Aug 1, 2024
- Applied Materials, Inc.
- Eric Jay Simmons
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING HIGHLY UNIFORM DIELECTRIC FILM
- Publication number 20240145217
- Publication date May 2, 2024
- Applied Materials, Inc.
- Qintao Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING FILM STACKS WITH REDUCED DEFECTS
- Publication number 20200227258
- Publication date Jul 16, 2020
- Applied Materials, Inc.
- Zhijun JIANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOW TEMPERATURE CONFORMAL DEPOSITION OF SILICON NITRIDE ON HIGH ASP...
- Publication number 20170084448
- Publication date Mar 23, 2017
- Applied Materials, Inc.
- Soumendra Narayan BARMAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Nitrogen-free dielectric anti-reflective coating and hardmask
- Publication number 20040214446
- Publication date Oct 28, 2004
- APPLIED MATERIALS, INC.
- Bok Hoen Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Miguel Fung

Person

Patents Grantslast 30 patents

Method of forming film stacks with reduced defects

Nitrogen-free dielectric anti-reflective coating and hardmask

Patents Applicationslast 30 patents

ION IMPLANTATION FOR REDUCED ROUGHNESS OF SILICON NITRIDE

SURFACE ROUGHNESS REDUCTION FOR PHOTONICS USING HIGH-TEMPERATURE IM...

METHOD FOR FORMING HIGHLY UNIFORM DIELECTRIC FILM

METHOD OF FORMING FILM STACKS WITH REDUCED DEFECTS

LOW TEMPERATURE CONFORMAL DEPOSITION OF SILICON NITRIDE ON HIGH ASP...

Nitrogen-free dielectric anti-reflective coating and hardmask