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Miguel Garcia-Medina
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Austin, TX, US
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Patents Grants
last 30 patents
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Patent Grant
Overlay variance stabilization methods and systems
Patent number
10,691,028
Issue date
Jun 23, 2020
KLA-Tencor Corporation
Hoyoung Heo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Layer-to-layer feedforward overlay control with alignment corrections
Patent number
10,444,639
Issue date
Oct 15, 2019
KLA-Tencor Corporation
Onur Nihat Demirer
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
Layer-to-Layer Feedforward Overlay Control with Alignment Corrections
Publication number
20180253016
Publication date
Sep 6, 2018
KLA-Tencor Corporation
Onur Nihat Demirer
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
Overlay Variance Stabilization Methods and Systems
Publication number
20170219928
Publication date
Aug 3, 2017
KLA-Tencor Corporation
Hoyoung Heo
G06 - COMPUTING CALCULATING COUNTING