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Mihail Mihaylov
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San Jose, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Focusing of optical devices
Patent number
11,163,144
Issue date
Nov 2, 2021
APPLEJACK 199 L.P.
Mihail Mihaylov
G02 - OPTICS
Information
Patent Grant
Focusing of optical devices
Patent number
10,935,777
Issue date
Mar 2, 2021
APPLEJACK 199 L.P.
Mihail Mihaylov
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Grant
Optical sensor for phase determination
Patent number
10,837,902
Issue date
Nov 17, 2020
Tokyo Electron Limited
Ivan Maleev
G01 - MEASURING TESTING
Information
Patent Grant
Advanced optical sensor and method for detecting an optical event i...
Patent number
10,692,705
Issue date
Jun 23, 2020
Tokyo Electron Limited
Mihail Mihaylov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Spatially resolved optical emission spectroscopy (OES) in plasma pr...
Patent number
10,473,525
Issue date
Nov 12, 2019
Tokyo Electron Limited
Ching-Ling Meng
G01 - MEASURING TESTING
Information
Patent Grant
Focusing of optical devices
Patent number
10,416,430
Issue date
Sep 17, 2019
Applejack 199 L.P.
Wojciech J Walecki
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Grant
Spatially resolved optical emission spectroscopy (OES) in plasma pr...
Patent number
9,970,818
Issue date
May 15, 2018
Tokyo Electron Limited
Junwei Bao
G01 - MEASURING TESTING
Information
Patent Grant
Differential acoustic time of flight measurement of temperature of...
Patent number
9,846,088
Issue date
Dec 19, 2017
Tokyo Electron Limited
Jun Pei
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System for in-situ film stack measurement during etching and etch c...
Patent number
9,059,038
Issue date
Jun 16, 2015
Tokyo Electron Limited
Shifang Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and system for lamp temperature control in optical metrology
Patent number
7,789,541
Issue date
Sep 7, 2010
Tokyo Electron Limited
Ching-Ling Meng
F21 - LIGHTING
Information
Patent Grant
Automated process control using an optical metrology system optimiz...
Patent number
7,761,178
Issue date
Jul 20, 2010
Tokyo Electron Limited
Xinkang Tian
G01 - MEASURING TESTING
Information
Patent Grant
Optical metrology system optimized with design goals
Patent number
7,761,250
Issue date
Jul 20, 2010
Tokyo Electron Limited
Xinkang Tian
G01 - MEASURING TESTING
Information
Patent Grant
Auto focusing of a workpiece using an array detector each with a de...
Patent number
7,595,471
Issue date
Sep 29, 2009
Tokyo Electron Limited
Mihail Mihaylov
G02 - OPTICS
Information
Patent Grant
Optical metrology system optimized with a plurality of design goals
Patent number
7,595,869
Issue date
Sep 29, 2009
Tokyo Electron Limited
Xinkang Tian
G01 - MEASURING TESTING
Information
Patent Grant
Digital detector data communication in an optical metrology tool
Patent number
6,867,870
Issue date
Mar 15, 2005
Therma-Wave, Inc.
Mihail Mihaylov
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
FOCUSING OF OPTICAL DEVICES
Publication number
20210132355
Publication date
May 6, 2021
Applejack 199 L.P.
Mihail MIHAYLOV
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Application
FOCUSING OF OPTICAL DEVICES
Publication number
20200033578
Publication date
Jan 30, 2020
Applejack 199 L.P.
Mihail MIHAYLOV
G02 - OPTICS
Information
Patent Application
OPTICAL SENSOR FOR PHASE DETERMINATION
Publication number
20190056320
Publication date
Feb 21, 2019
TOKYO ELECTRON LIMITED
Ivan MALEEV
G01 - MEASURING TESTING
Information
Patent Application
FOCUSING OF OPTICAL DEVICES
Publication number
20180329192
Publication date
Nov 15, 2018
Applejack 199 L.P.
Wojciech J. WALECKI
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Application
ADVANCED OPTICAL SENSOR, SYSTEM, AND METHODOLOGIES FOR ETCH PROCESS...
Publication number
20180286643
Publication date
Oct 4, 2018
TOKYO ELECTRON LIMITED
Holger TUITJE
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SPATIALLY RESOLVED OPTICAL EMISSION SPECTROSCOPY (OES) IN PLASMA PR...
Publication number
20170314991
Publication date
Nov 2, 2017
TOKYO ELECTRON LIMITED
Ching-Ling MENG
G01 - MEASURING TESTING
Information
Patent Application
ADVANCED OPTICAL SENSOR AND METHOD FOR PLASMA CHAMBER
Publication number
20170140905
Publication date
May 18, 2017
TOKYO ELECTRON LIMITED
Mihail Mihaylov
G01 - MEASURING TESTING
Information
Patent Application
SPATIALLY RESOLVED OPTICAL EMISSION SPECTROSCOPY (OES) IN PLASMA PR...
Publication number
20150124250
Publication date
May 7, 2015
TOKYO ELECTRON LIMITED
Junwei BAO
G01 - MEASURING TESTING
Information
Patent Application
DIFFERENTIAL ACOUSTIC TIME OF FLIGHT MEASUREMENT OF TEMPERATURE OF...
Publication number
20150078416
Publication date
Mar 19, 2015
TOKYO ELECTRON LIMITED
Jun PEI
G01 - MEASURING TESTING
Information
Patent Application
SYSTEM FOR IN-SITU FILM STACK MEASUREMENT DURING ETCHING AND ETCH C...
Publication number
20140024143
Publication date
Jan 23, 2014
TOKYO ELECTRON LIMITED
Shifang LI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
AUTO FOCUS ARRAY DETECTOR OPTIMIZED FOR OPERATING OBJECTIVES
Publication number
20100118316
Publication date
May 13, 2010
TOKYO ELECTRON LIMITED
MIHAIL MIHAYLOV
G02 - OPTICS
Information
Patent Application
AUTOMATED PROCESS CONTROL USING AN OPTICAL METROLOGY SYSTEM OPTIMIZ...
Publication number
20090319075
Publication date
Dec 24, 2009
TOKYO ELECTRON LIMITED
XINKANG TIAN
G01 - MEASURING TESTING
Information
Patent Application
OPTICAL METROLOGY SYSTEM OPTIMIZED WITH DESIGN GOALS
Publication number
20090319214
Publication date
Dec 24, 2009
TOKYO ELECTRON LIMITED
XINKANG TIAN
G01 - MEASURING TESTING
Information
Patent Application
METHOD AND SYSTEM FOR LAMP TEMPERATURE CONTROL IN OPTICAL METROLOGY
Publication number
20090244910
Publication date
Oct 1, 2009
TOKYO ELECTRON LIMITED
Ching-Ling MENG
F21 - LIGHTING