TREA

Mika Jauhiainen

Follow

Person

  • Jyvaskyla, FI
People

Patents Grantslast 30 patents

  • Information Patent Grant

    Nozzle and nozzle head
    • Patent number 11,702,745
    • Issue date Jul 18, 2023
    • Beneq Oy
    • Pekka Soininen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Nozzle head and apparatus
    • Patent number 11,214,866
    • Issue date Jan 4, 2022
    • Beneq Oy
    • Pekka Soininen
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Grant

    Apparatus and method for processing substrate
    • Patent number 10,023,957
    • Issue date Jul 17, 2018
    • Beneq Oy
    • Mika Jauhiainen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Arrangement in connection with ALD reactor
    • Patent number 8,496,753
    • Issue date Jul 30, 2013
    • Beneq Oy
    • Mika Jauhiainen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    AN ATOMIC LAYER DEPOSITION APPARATUS AND A METHOD
    • Publication number 20230407474
    • Publication date Dec 21, 2023
    • BENEQ OY
    • Mika Jauhiainen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    AN ATOMIC LAYER DEPOSITION APPARATUS AND A METHOD
    • Publication number 20230392256
    • Publication date Dec 7, 2023
    • BENEQ OY
    • Mika Jauhiainen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    NOZZLE HEAD
    • Publication number 20210214847
    • Publication date Jul 15, 2021
    • BENEQ OY
    • Pekka Soininen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    NOZZLE HEAD AND APPARATUS
    • Publication number 20210025057
    • Publication date Jan 28, 2021
    • BENEQ OY
    • Pekka SOININEN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    NOZZLE AND NOZZLE HEAD
    • Publication number 20200385863
    • Publication date Dec 10, 2020
    • BENEQ OY
    • Pekka Soininen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    APPARATUS FOR PROCESSING SUBSTRATE
    • Publication number 20180251896
    • Publication date Sep 6, 2018
    • BENEQ OY
    • Mika Jauhiainen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    APPARATUS AND METHOD FOR PROCESSING SUBSTRATE
    • Publication number 20150167164
    • Publication date Jun 18, 2015
    • BENEQ OY
    • Mika Jauhiainen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    NOZZLE AND NOZZLE HEAD
    • Publication number 20150004318
    • Publication date Jan 1, 2015
    • BENEQ OY
    • Tapani Alasaarela
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ARRANGEMENT IN CONNECTION WITH ALD REACTOR
    • Publication number 20110036291
    • Publication date Feb 17, 2011
    • Beneq Oy
    • Mika Jauhiainen
    • C30 - CRYSTAL GROWTH