Mika OKUMURA

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Semiconductor device and semiconductor device manufacturing method
- Patent number 11,459,226
- Issue date Oct 4, 2022
- Mitsubishi Electric Corporation
- Yasuo Yamaguchi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device and method of manufacturing the same
- Patent number 10,252,905
- Issue date Apr 9, 2019
- Mitsubishi Electric Corporation
- Mika Okumura
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device and method of manufacturing the same
- Patent number 8,618,666
- Issue date Dec 31, 2013
- Mitsubishi Electric Corporation
- Mika Okumura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method of manufacture thereof
- Patent number 8,390,121
- Issue date Mar 5, 2013
- Mitsubishi Electric Corporation
- Mika Okumura
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Element wafer and method for manufacturing the same
- Patent number 8,304,899
- Issue date Nov 6, 2012
- Mitsubishi Electric Corporation
- Mika Okumura
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device and method of manufacturing the semiconductor...
- Patent number 8,193,631
- Issue date Jun 5, 2012
- Mitsubishi Electric Corporation
- Kimitoshi Sato
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Acceleration sensor and fabrication method thereof
- Patent number 7,900,515
- Issue date Mar 8, 2011
- Mitsubishi Electric Corporation
- Yasuo Yamaguchi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electrostatic-capacitance-type acceleration sensor
- Patent number 7,533,570
- Issue date May 19, 2009
- Mitsubishi Denki Kabushiki Kaisha
- Yasuo Yamaguchi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Thin film accelerometer
- Patent number 7,495,301
- Issue date Feb 24, 2009
- Mitsubishi Denki Kabushiki Kaisha
- Mika Okumura
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Thin-film structure and method for manufacturing the same, and acce...
- Patent number 7,371,600
- Issue date May 13, 2008
- Mitsubishi Denki Kabushiki Kaisha
- Kiyoshi Ishibashi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device manufacturing method
- Patent number 7,094,620
- Issue date Aug 22, 2006
- Mitsubishi Denki Kabushiki Kaisha
- Mika Okumura
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing thin-film structure
- Patent number 7,041,593
- Issue date May 9, 2006
- Mitsubishi Denki Kabushiki Kaisha
- Mika Okumura
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Acceleration sensor and method of manufacture thereof
- Patent number 6,958,529
- Issue date Oct 25, 2005
- Mitsubishi Denki Kabushiki Kaisha
- Kiyoshi Ishibashi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing thin-film structure
- Patent number 6,905,905
- Issue date Jun 14, 2005
- Mitsubishi Denki Kabushiki Kaisha
- Mika Okumura
- G01 - MEASURING TESTING
Information Patent Grant
Substrate and method for producing the same, and thin film structure
- Patent number 6,900,071
- Issue date May 31, 2005
- Mitsubishi Denki Kabushiki Kaisha
- Mika Okumura
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electrode structure, and method for manufacturing thin-film structure
- Patent number 6,812,568
- Issue date Nov 2, 2004
- Mitsubishi Denki Kabushiki Kaisha
- Makio Horikawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing thin-film structure
- Patent number 6,784,011
- Issue date Aug 31, 2004
- Mitsubishi Denki Kabushiki Kaisha
- Mika Okumura
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
- Publication number 20180215606
- Publication date Aug 2, 2018
- Mitsubishi Electric Corporation
- Yasuo YAMAGUCHI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20170341929
- Publication date Nov 30, 2017
- Mitsubishi Electric Corporation
- Mika OKUMURA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACCELERATION SENSOR
- Publication number 20120160029
- Publication date Jun 28, 2012
- MITSUBISHI ELECTRIC CORPORATION
- Yasuo YAMAGUCHI
- G01 - MEASURING TESTING
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURE THEREOF
- Publication number 20110303992
- Publication date Dec 15, 2011
- MITSUBISHI ELECTRIC CORPORATION
- Mika OKUMURA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20110042811
- Publication date Feb 24, 2011
- MITSUBISHI ELECTRIC CORPORATION
- Mika OKUMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELEMENT WAFER AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20090230485
- Publication date Sep 17, 2009
- MITSUBISHI ELECTRIC CORPORATION
- Mika OKUMURA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SEMICONDUCTOR...
- Publication number 20090166623
- Publication date Jul 2, 2009
- MITSUBISHI ELECTRIC CORPORATION
- Kimitoshi SATO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACCELERATION SENSOR AND FABRICATION METHOD THEREOF
- Publication number 20080302184
- Publication date Dec 11, 2008
- Mitsubishi Electric Corporation
- Yasuo Yamaguchi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTROSTATIC-CAPACITANCE-TYPE ACCELERATION SENSOR
- Publication number 20070062285
- Publication date Mar 22, 2007
- Mitsubishi Denki Kabushiki Kaisha
- Yasuo YAMAGUCHI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
THIN FILM STRUCTURE AND MANUFACTURING METHOD THEREFOR
- Publication number 20070031638
- Publication date Feb 8, 2007
- Mitsubishi Denki Kabushiki Kaisha
- Mika OKUMURA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for fabricating semiconductor device and acceleration sensor
- Publication number 20050227477
- Publication date Oct 13, 2005
- Mitsubishi Denki Kabushiki Kaisha
- Mika Okumura
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Substrate and method for producing the same, and thin film structure
- Publication number 20040021186
- Publication date Feb 5, 2004
- Mika Okumura
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for manufacturing thin-film structure
- Publication number 20040020897
- Publication date Feb 5, 2004
- Mika Okumura
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Electrode structure, and method for manufacturing thin-film structure
- Publication number 20030190817
- Publication date Oct 9, 2003
- Makio Horikawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for manufacturing thin-film structure
- Publication number 20030186480
- Publication date Oct 2, 2003
- Mika Okumura
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Thin-film structure and method for manufacturing the same, and acce...
- Publication number 20030180981
- Publication date Sep 25, 2003
- Kiyoshi Ishibashi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for manufacturing thin-film structure
- Publication number 20030176008
- Publication date Sep 18, 2003
- Mika Okumura
- G01 - MEASURING TESTING
Information Patent Application
ACCELERATION SENSOR AND METHOD OF MANUFACTURE THEROF
- Publication number 20030155622
- Publication date Aug 21, 2003
- Kiyoshi Ishibashi
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Mika OKUMURA

Person

Patents Grantslast 30 patents

Semiconductor device and semiconductor device manufacturing method

Semiconductor device and method of manufacturing the same

Semiconductor device and method of manufacturing the same

Semiconductor device and method of manufacture thereof

Element wafer and method for manufacturing the same

Semiconductor device and method of manufacturing the semiconductor...

Acceleration sensor and fabrication method thereof

Electrostatic-capacitance-type acceleration sensor

Thin film accelerometer

Thin-film structure and method for manufacturing the same, and acce...

Semiconductor device manufacturing method

Method for manufacturing thin-film structure

Acceleration sensor and method of manufacture thereof

Method of manufacturing thin-film structure

Substrate and method for producing the same, and thin film structure

Electrode structure, and method for manufacturing thin-film structure

Method for manufacturing thin-film structure

Patents Applicationslast 30 patents

SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

ACCELERATION SENSOR

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURE THEREOF

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

ELEMENT WAFER AND METHOD FOR MANUFACTURING THE SAME

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SEMICONDUCTOR...

ACCELERATION SENSOR AND FABRICATION METHOD THEREOF

ELECTROSTATIC-CAPACITANCE-TYPE ACCELERATION SENSOR

THIN FILM STRUCTURE AND MANUFACTURING METHOD THEREFOR

Method for fabricating semiconductor device and acceleration sensor

Substrate and method for producing the same, and thin film structure

Method for manufacturing thin-film structure

Electrode structure, and method for manufacturing thin-film structure

Method for manufacturing thin-film structure

Thin-film structure and method for manufacturing the same, and acce...

Method for manufacturing thin-film structure

ACCELERATION SENSOR AND METHOD OF MANUFACTURE THEROF