Mike Adel

Person

Zichron Ya'akov, IL

People

Patents Grantslast 30 patents

Information Patent Grant
Metrology target design for tilted device designs
- Patent number 12,117,347
- Issue date Oct 15, 2024
- KLA Corporation
- Myungjun Lee
- G01 - MEASURING TESTING
Information Patent Grant
Verification metrology targets and their design
- Patent number 11,874,605
- Issue date Jan 16, 2024
- KLA Corporation
- Michael E. Adel
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Determining the impacts of stochastic behavior on overlay metrology...
- Patent number 10,901,325
- Issue date Jan 26, 2021
- KLA-Tencor Corporation
- Evgeni Gurevich
- G01 - MEASURING TESTING
Information Patent Grant
Overlay targets with orthogonal underlayer dummyfill
- Patent number 10,890,436
- Issue date Jan 12, 2021
- KLA Corporation
- Nuriel Amir
- G01 - MEASURING TESTING
Information Patent Grant
Recipe optimization based zonal analysis
- Patent number 10,763,146
- Issue date Sep 1, 2020
- KLA-Tencor Corporation
- Roie Volkovich
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Target and process sensitivity analysis to requirements
- Patent number 10,726,169
- Issue date Jul 28, 2020
- KLA-Tencor Corporation
- Michael E. Adel
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Verification metrology target and their design
- Patent number 10,705,434
- Issue date Jul 7, 2020
- KLA-Tencor Corporation
- Michael E. Adel
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Process compatibility improvement by fill factor modulation
- Patent number 10,579,768
- Issue date Mar 3, 2020
- KLA-Tencor Corporation
- Vladimir Levinski
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Apparatus and methods for detecting overlay errors using scatterometry
- Patent number 10,451,412
- Issue date Oct 22, 2019
- KLA-Tencor Corporation
- Michael Adel
- G01 - MEASURING TESTING
Information Patent Grant
Overlay control with non-zero offset prediction
- Patent number 10,409,171
- Issue date Sep 10, 2019
- KLA-Tencor Corporation
- Michael E. Adel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Metrology target identification, design and verification
- Patent number 10,387,608
- Issue date Aug 20, 2019
- KLA-Tencor Corporation
- Michael Adel
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Analyzing root causes of process variation in scatterometry metrology
- Patent number 10,203,200
- Issue date Feb 12, 2019
- KLA-Tencor Corporation
- Tal Marciano
- G01 - MEASURING TESTING
Information Patent Grant
Periodic patterns and technique to control misalignment between two...
- Patent number 10,151,584
- Issue date Dec 11, 2018
- KLA-Tencor Corporation
- Ibrahim Abdulhalim
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Solar thermal collecting system
- Patent number 10,036,575
- Issue date Jul 31, 2018
- Tigi Ltd.
- Shimon Klier
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
On-product derivation and adjustment of exposure parameters in a di...
- Patent number 10,025,285
- Issue date Jul 17, 2018
- KLA-Tencor Corporation
- Roie Volkovich
- G05 - CONTROLLING REGULATING
Information Patent Grant
Metrology target identification, design and verification
- Patent number 9,910,953
- Issue date Mar 6, 2018
- KLA-Tencor Corporation
- Michael Adel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Feed forward of metrology data in a metrology system
- Patent number 9,903,711
- Issue date Feb 27, 2018
- KLA-Tencor Corporation
- Ady Levy
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
On-device metrology
- Patent number 9,875,946
- Issue date Jan 23, 2018
- KLA-Tencor Corporation
- Andrei V. Shchegrov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Periodic patterns and technique to control misalignment between two...
- Patent number 9,835,447
- Issue date Dec 5, 2017
- KLA-Tencor Corporation
- Ibrahim Abdulhalim
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for measuring overlay errors
- Patent number 9,702,693
- Issue date Jul 11, 2017
- KLA-Tencor Corporation
- Mark Ghinovker
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods and systems for creating or performing a dynamic sampling s...
- Patent number 9,651,943
- Issue date May 16, 2017
- KLA-Tencor Corp.
- Pavel Izikson
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method and system for universal target based inspection and metrology
- Patent number 9,576,861
- Issue date Feb 21, 2017
- KLA-Tencor Corporation
- Allen Park
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Material handling with dedicated automated material handling system
- Patent number 9,558,978
- Issue date Jan 31, 2017
- KLA-Tencor Corporation
- Amir Widmann
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Metrology through use of feed forward feed sideways and measurement...
- Patent number 9,559,019
- Issue date Jan 31, 2017
- KLA-Tencor Corporation
- Michael Adel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Periodic patterns and technique to control misalignment between two...
- Patent number 9,476,698
- Issue date Oct 25, 2016
- KLA-Tencor Corporation
- Ibrahim Abdulhalim
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and methods for detecting overlay errors using scatterometry
- Patent number 9,347,879
- Issue date May 24, 2016
- KLA-Tencor Corporation
- Michael Adel
- G01 - MEASURING TESTING
Information Patent Grant
System and method for temperature limiting in a sealed solar energy...
- Patent number 9,335,068
- Issue date May 10, 2016
- TIGI LTD.
- Shimon Klier
- F24 - HEATING RANGES VENTILATING
Information Patent Grant
Periodic patterns and techniques to control misalignment between tw...
- Patent number 9,234,745
- Issue date Jan 12, 2016
- KLA-Tencor Corporation
- Ibrahim Abdulhalim
- G01 - MEASURING TESTING
Information Patent Grant
Rule checking for metrology and inspection
- Patent number 9,151,712
- Issue date Oct 6, 2015
- KLA-Tencor Corporation
- Michael Adel
- G01 - MEASURING TESTING
Information Patent Grant
Feedforward/feedback litho process control of stress and overlay
- Patent number 9,116,442
- Issue date Aug 25, 2015
- KLA-Tencor Corporation
- Michael Adel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METROLOGY TARGET DESIGN FOR TILTED DEVICE DESIGNS
- Publication number 20250035489
- Publication date Jan 30, 2025
- KLA Corporation
- Myungjun Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Dispositioning and Control of a Semiconductor Manufacturi...
- Publication number 20240258066
- Publication date Aug 1, 2024
- FRACTILIA, LLC
- Chris Mack
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
OVERLAY MEASUREMENT FOR A SEMICONDUCTOR SPECIMEN
- Publication number 20240062355
- Publication date Feb 22, 2024
- APPLIED MATERIALS ISRAEL LTD.
- Dror ALUMOT
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Verification Metrology Targets and Their Design
- Publication number 20200348604
- Publication date Nov 5, 2020
- KLA Corporation
- Michael E. Adel
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Recipe Optimization Based Zonal Analysis
- Publication number 20190088514
- Publication date Mar 21, 2019
- KLA-Tencor Corporation
- Roie VOLKOVICH
- G01 - MEASURING TESTING
Information Patent Application
DETERMINING THE IMPACTS OF STOCHASTIC BEHAVIOR ON OVERLAY METROLOGY...
- Publication number 20190049858
- Publication date Feb 14, 2019
- KLA-Tencor Corporation
- Evgeni GUREVICH
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Overlay Control with Non-Zero Offset Prediction
- Publication number 20180253017
- Publication date Sep 6, 2018
- KLA-Tencor Corporation
- Michael E. Adel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Process Compatibility Improvement by Fill Factor Modulation
- Publication number 20180157784
- Publication date Jun 7, 2018
- KLA-Tencor Corporation
- Vladimir Levinski
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PERIODIC PATTERNS AND TECHNIQUE TO CONTROL MISALIGNMENT BETWEEN TWO...
- Publication number 20180100735
- Publication date Apr 12, 2018
- KLA-Tencor Corporation
- Ibrahim Abdulhalim
- G01 - MEASURING TESTING
Information Patent Application
METROLOGY TARGET IDENTIFICATION, DESIGN AND VERIFICATION
- Publication number 20180032662
- Publication date Feb 1, 2018
- KLA-Tencor Corporation
- Michael Adel
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Analyzing Root Causes of Process Variation in Scatterometry Metrology
- Publication number 20180023950
- Publication date Jan 25, 2018
- KLA-Tencor Corporation
- Tal Marciano
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHODS FOR DETECTING OVERLAY ERRORS USING SCATTEROMETRY
- Publication number 20170336198
- Publication date Nov 23, 2017
- KLA-Tencor Corporation
- Michael Adel
- G01 - MEASURING TESTING
Information Patent Application
Methods and Systems for Creating or Performing a Dynamic Sampling S...
- Publication number 20170255188
- Publication date Sep 7, 2017
- KLA-Tencor Corporation
- Pavel Izikson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
VERIFICATION METROLOGY TARGETS AND THEIR DESIGN
- Publication number 20170060001
- Publication date Mar 2, 2017
- KLA-Tencor Corporation
- Michael E. Adel
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PERIODIC PATTERNS AND TECHNIQUE TO CONTROL MISALIGNMENT BETWEEN TWO...
- Publication number 20170038198
- Publication date Feb 9, 2017
- KLA-Tencor Corporation
- Ibrahim Abdulhalim
- G01 - MEASURING TESTING
Information Patent Application
METROLOGY TARGET DESIGN FOR TILTED DEVICE DESIGNS
- Publication number 20170023358
- Publication date Jan 26, 2017
- KLA-Tencor Corporation
- Myungjun Lee
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS FOR MEASURING OVERLAY ERRORS
- Publication number 20160313116
- Publication date Oct 27, 2016
- KLA-Tencor Corporation
- Mark Ghinovker
- G01 - MEASURING TESTING
Information Patent Application
Feed Forward of Metrology Data in a Metrology System
- Publication number 20160290796
- Publication date Oct 6, 2016
- KLA-Tencor Corporation
- Ady Levy
- G01 - MEASURING TESTING
Information Patent Application
METROLOGY TARGET INDENTIFICATION, DESIGN AND VERIFICATION
- Publication number 20160196379
- Publication date Jul 7, 2016
- Michael Adel
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Periodic Patterns and Technique to Control Misalignment Between Two...
- Publication number 20160084639
- Publication date Mar 24, 2016
- KLA-Tencor Corporation
- Ibrahim Abdulhalim
- G01 - MEASURING TESTING
Information Patent Application
In-line heated solar thermal storage collector
- Publication number 20160047556
- Publication date Feb 18, 2016
- TIGI LTD.
- Shimon KLIER
- F24 - HEATING RANGES VENTILATING
Information Patent Application
APPARATUS AND METHODS FOR DETECTING OVERLAY ERRORS USING SCATTEROMETRY
- Publication number 20160047744
- Publication date Feb 18, 2016
- KLA-Tencor Corporation
- Michael Adel
- G01 - MEASURING TESTING
Information Patent Application
TARGET AND PROCESS SENSITIVITY ANALYSIS TO REQUIREMENTS
- Publication number 20160042105
- Publication date Feb 11, 2016
- KLA-Tencor Corporation
- Michael E. Adel
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ON-PRODUCT DERIVATION AND ADJUSTMENT OF EXPOSURE PARAMETERS IN A DI...
- Publication number 20150301514
- Publication date Oct 22, 2015
- KLA-Tencor Corporation
- Roie VOLKOVICH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Periodic Patterns and Techniques to Control Misalignment Between Tw...
- Publication number 20150300815
- Publication date Oct 22, 2015
- KLA-Tencor Corporation
- Ibrahim Abdulhalim
- G01 - MEASURING TESTING
Information Patent Application
METROLOGY THROUGH USE OF FEED FORWARD FEED SIDEWAYS AND MEASUREMENT...
- Publication number 20150112624
- Publication date Apr 23, 2015
- KLA-Tencor Corporation
- Michael Adel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR TEMPERATURE LIMITING IN A SEALED SOLAR ENERGY...
- Publication number 20150075517
- Publication date Mar 19, 2015
- TIGI LTD.
- Shimon KLIER
- F24 - HEATING RANGES VENTILATING
Information Patent Application
ON-DEVICE METROLOGY
- Publication number 20140316730
- Publication date Oct 23, 2014
- Andrei V. Shchegrov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and System for Universal Target Based Inspection and Metrology
- Publication number 20140199791
- Publication date Jul 17, 2014
- KLA-Tencor Corporation
- Allen Park
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method of removal of snow or ice coverage from solar collectors
- Publication number 20140166044
- Publication date Jun 19, 2014
- TIGI LTD.
- Zvika Klier
- B08 - CLEANING

Person

Patents Grantslast 30 patents

Metrology target design for tilted device designs

Verification metrology targets and their design

Determining the impacts of stochastic behavior on overlay metrology...

Overlay targets with orthogonal underlayer dummyfill

Recipe optimization based zonal analysis

Target and process sensitivity analysis to requirements

Verification metrology target and their design

Process compatibility improvement by fill factor modulation

Apparatus and methods for detecting overlay errors using scatterometry

Overlay control with non-zero offset prediction

Metrology target identification, design and verification

Analyzing root causes of process variation in scatterometry metrology

Periodic patterns and technique to control misalignment between two...

Solar thermal collecting system

On-product derivation and adjustment of exposure parameters in a di...

Metrology target identification, design and verification

Feed forward of metrology data in a metrology system

On-device metrology

Periodic patterns and technique to control misalignment between two...

Apparatus for measuring overlay errors

Methods and systems for creating or performing a dynamic sampling s...

Method and system for universal target based inspection and metrology

Material handling with dedicated automated material handling system

Metrology through use of feed forward feed sideways and measurement...

Periodic patterns and technique to control misalignment between two...

Apparatus and methods for detecting overlay errors using scatterometry

System and method for temperature limiting in a sealed solar energy...

Periodic patterns and techniques to control misalignment between tw...

Rule checking for metrology and inspection

Feedforward/feedback litho process control of stress and overlay

Patents Applicationslast 30 patents

METROLOGY TARGET DESIGN FOR TILTED DEVICE DESIGNS

Method of Dispositioning and Control of a Semiconductor Manufacturi...

OVERLAY MEASUREMENT FOR A SEMICONDUCTOR SPECIMEN

Verification Metrology Targets and Their Design

Recipe Optimization Based Zonal Analysis

DETERMINING THE IMPACTS OF STOCHASTIC BEHAVIOR ON OVERLAY METROLOGY...

Overlay Control with Non-Zero Offset Prediction

Process Compatibility Improvement by Fill Factor Modulation

PERIODIC PATTERNS AND TECHNIQUE TO CONTROL MISALIGNMENT BETWEEN TWO...

METROLOGY TARGET IDENTIFICATION, DESIGN AND VERIFICATION

Analyzing Root Causes of Process Variation in Scatterometry Metrology

APPARATUS AND METHODS FOR DETECTING OVERLAY ERRORS USING SCATTEROMETRY

Methods and Systems for Creating or Performing a Dynamic Sampling S...

VERIFICATION METROLOGY TARGETS AND THEIR DESIGN

PERIODIC PATTERNS AND TECHNIQUE TO CONTROL MISALIGNMENT BETWEEN TWO...

METROLOGY TARGET DESIGN FOR TILTED DEVICE DESIGNS

APPARATUS FOR MEASURING OVERLAY ERRORS

Feed Forward of Metrology Data in a Metrology System

METROLOGY TARGET INDENTIFICATION, DESIGN AND VERIFICATION

Periodic Patterns and Technique to Control Misalignment Between Two...

In-line heated solar thermal storage collector

APPARATUS AND METHODS FOR DETECTING OVERLAY ERRORS USING SCATTEROMETRY

TARGET AND PROCESS SENSITIVITY ANALYSIS TO REQUIREMENTS

ON-PRODUCT DERIVATION AND ADJUSTMENT OF EXPOSURE PARAMETERS IN A DI...

Periodic Patterns and Techniques to Control Misalignment Between Tw...

METROLOGY THROUGH USE OF FEED FORWARD FEED SIDEWAYS AND MEASUREMENT...

SYSTEM AND METHOD FOR TEMPERATURE LIMITING IN A SEALED SOLAR ENERGY...

ON-DEVICE METROLOGY

Method and System for Universal Target Based Inspection and Metrology

Method of removal of snow or ice coverage from solar collectors