Mike Kirk

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Systems and methods for defect material classification
- Patent number 10,670,537
- Issue date Jun 2, 2020
- KLA-Tencor Corporation
- Guoheng Zhao
- G01 - MEASURING TESTING
Information Patent Grant
Systems and methods for defect material classification
- Patent number 10,234,402
- Issue date Mar 19, 2019
- KLA-Tencor Corporation
- Guoheng Zhao
- G01 - MEASURING TESTING
Information Patent Grant
System and method to emulate finite element model based prediction...
- Patent number 10,025,894
- Issue date Jul 17, 2018
- KLA-Tencor Corporation
- Pradeep Vukkadala
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Detection of selected defects in relatively noisy inspection data
- Patent number 9,646,379
- Issue date May 9, 2017
- KLA-Tencor Corp.
- Haiguang Chen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System and method to emulate finite element model based prediction...
- Patent number 9,430,593
- Issue date Aug 30, 2016
- KLA-Tencor Corporation
- Pradeep Vukkadala
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Detection of selected defects in relatively noisy inspection data
- Patent number 9,355,440
- Issue date May 31, 2016
- KLA-Tencor Corp.
- Haiguang Chen
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for determining a characteristic of a wafer
- Patent number 8,422,010
- Issue date Apr 16, 2013
- KLA-Tencor Technologies Corp.
- Michael D. Kirk
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for determining a characteristic of a wafer
- Patent number 8,284,394
- Issue date Oct 9, 2012
- KLA-Tencor Technologies Corp.
- Michael D. Kirk
- G01 - MEASURING TESTING
Information Patent Grant
Defect detection
- Patent number 7,796,805
- Issue date Sep 14, 2010
- KLA-Tencor Corporation
- Michael D. Kirk
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for detection of selected defects particularly...
- Patent number 7,711,521
- Issue date May 4, 2010
- KLA-Tencor Technologies Corp.
- Sean Wu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Computer-implemented methods and systems for determining a configur...
- Patent number 7,436,505
- Issue date Oct 14, 2008
- KLA-Tencor Technologies Corp.
- Alexander Belyaev
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for detection of selected defects particularly...
- Patent number 7,373,277
- Issue date May 13, 2008
- KLA-Tencor Technologies Corp.
- Sean Wu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Systems for inspection of patterned or unpatterned wafers and other...
- Patent number 7,068,363
- Issue date Jun 27, 2006
- KLA-Tencor Technologies Corp.
- Christopher F. Bevis
- G01 - MEASURING TESTING
Information Patent Grant
Optical microscope stage for scanning probe microscope
- Patent number 6,310,342
- Issue date Oct 30, 2001
- ThermoMicroscopes Corporation
- David Braunstein
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Scanning probe microscope with multimode head
- Patent number 6,130,427
- Issue date Oct 10, 2000
- Park Scientific Instruments
- Sang-Il Park
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Kinematically mounted probe holder for scanning probe microscope
- Patent number 6,057,546
- Issue date May 2, 2000
- Thermomicroscopes Corp.
- David Braunstein
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Scanning probe microscope with scan correction
- Patent number 5,939,719
- Issue date Aug 17, 1999
- ThermoMicroscopes Corporation
- Sang-Il Park
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Scanning probe microscope providing unobstructed top down and botto...
- Patent number 5,854,487
- Issue date Dec 29, 1998
- Park Scientific Instruments
- David Braunstein
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Single axis vibration reducing system
- Patent number 5,811,821
- Issue date Sep 22, 1998
- Park Scientific Instruments
- John D. Alexander
- G05 - CONTROLLING REGULATING
Information Patent Grant
Large stage system for scanning probe microscopes and other instrum...
- Patent number 5,672,816
- Issue date Sep 30, 1997
- Park Scientific Instruments
- Sang-il Park
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Scanning force microscope having aligning and adjusting means
- Patent number RE35514
- Issue date May 20, 1997
- Park Scientific Instruments
- Thomas R. Albrecht
- 250 - Radiant energy
Information Patent Grant
Scanning probe microscope
- Patent number 5,496,999
- Issue date Mar 5, 1996
- Frederick I. Linker
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Piezoresistive cantilever with integral tip for scanning probe micr...
- Patent number 5,444,244
- Issue date Aug 22, 1995
- Park Scientific Instruments Corporation
- Michael D. Kirk
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Scanning probe microscope
- Patent number 5,376,790
- Issue date Dec 27, 1994
- Park Scientific Instruments
- Frederick I. Linker
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Scanning force microscope having aligning and adjusting means
- Patent number 5,157,251
- Issue date Oct 20, 1992
- Park Scientific Instruments
- Thomas R. Albrecht
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
Systems and Methods for Defect Material Classification
- Publication number 20190212277
- Publication date Jul 11, 2019
- KLA-Tencor Corporation
- Guoheng Zhao
- G01 - MEASURING TESTING
Information Patent Application
Systems and Methods for Defect Material Classification
- Publication number 20180188188
- Publication date Jul 5, 2018
- KLA-Tencor Corporation
- Guoheng Zhao
- G01 - MEASURING TESTING
Information Patent Application
System and Method to Emulate Finite Element Model Based Prediction...
- Publication number 20160283625
- Publication date Sep 29, 2016
- KLA-Tencor Corporation
- Pradeep Vukkadala
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
System and Method to Emulate Finite Element Model Based Prediction...
- Publication number 20140107998
- Publication date Apr 17, 2014
- KLA-Tencor Corporation
- Pradeep Vukkadala
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Methods and Systems for Determining a Characteristic of a Wafer
- Publication number 20130035877
- Publication date Feb 7, 2013
- KLA-Tencor Technologies Corporation
- Michael D. Kirk
- G01 - MEASURING TESTING
Information Patent Application
METHODS AND SYSTEMS FOR DETERMINING A CHARACTERISTIC OF A WAFER
- Publication number 20080013083
- Publication date Jan 17, 2008
- Michael D. Kirk
- G01 - MEASURING TESTING
Information Patent Application
Computer-Implemented Methods and Systems for Determining a Configur...
- Publication number 20070229809
- Publication date Oct 4, 2007
- KLA-TENCOR TECHNOLOGIES CORP.
- Alexander Belyaev
- G01 - MEASURING TESTING
Information Patent Application
Systems for inspection of patterned or unpatterned wafers and other...
- Publication number 20040246476
- Publication date Dec 9, 2004
- Christopher F. Bevis
- G01 - MEASURING TESTING

Person

Patents Grantslast 30 patents

Systems and methods for defect material classification

Systems and methods for defect material classification

System and method to emulate finite element model based prediction...

Detection of selected defects in relatively noisy inspection data

System and method to emulate finite element model based prediction...

Detection of selected defects in relatively noisy inspection data

Methods and systems for determining a characteristic of a wafer

Methods and systems for determining a characteristic of a wafer

Defect detection

Methods and systems for detection of selected defects particularly...

Computer-implemented methods and systems for determining a configur...

Methods and systems for detection of selected defects particularly...

Systems for inspection of patterned or unpatterned wafers and other...

Optical microscope stage for scanning probe microscope

Scanning probe microscope with multimode head

Kinematically mounted probe holder for scanning probe microscope

Scanning probe microscope with scan correction

Scanning probe microscope providing unobstructed top down and botto...

Single axis vibration reducing system

Large stage system for scanning probe microscopes and other instrum...

Scanning force microscope having aligning and adjusting means

Scanning probe microscope

Piezoresistive cantilever with integral tip for scanning probe micr...

Scanning probe microscope

Scanning force microscope having aligning and adjusting means

Patents Applicationslast 30 patents

Systems and Methods for Defect Material Classification

Systems and Methods for Defect Material Classification

System and Method to Emulate Finite Element Model Based Prediction...

System and Method to Emulate Finite Element Model Based Prediction...

Methods and Systems for Determining a Characteristic of a Wafer

METHODS AND SYSTEMS FOR DETERMINING A CHARACTERISTIC OF A WAFER

Computer-Implemented Methods and Systems for Determining a Configur...

Systems for inspection of patterned or unpatterned wafers and other...