Mike Kubani

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San Jose, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Purged heater-susceptor for an ALD/CVD reactor
- Patent number 7,015,426
- Issue date Mar 21, 2006
- Genus, Inc.
- Ken Doering
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Purged heater-susceptor for an ALD/CVD reactor
- Publication number 20040211764
- Publication date Oct 28, 2004
- Ken Doering
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...