Membership
Tour
Register
Log in
Mike Moeritz
Follow
Person
Jena, DE
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Arrangement and method for the generation of extreme ultraviolet ra...
Patent number
7,812,542
Issue date
Oct 12, 2010
XTREME Technologies GmbH
Guido Hergenhan
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
ARRANGEMENT AND METHOD FOR THE GENERATION OF EXTREME ULTRAVIOLET RA...
Publication number
20080180029
Publication date
Jul 31, 2008
XTREME technologies GmbH;
Guido Hergenhan
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR