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Mike Roberts
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Tigard, OR, US
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Patents Grants
last 30 patents
Information
Patent Grant
Dual gas feed showerhead for deposition
Patent number
11,535,936
Issue date
Dec 27, 2022
Lam Research Corporation
Michael Philip Roberts
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Multi zone substrate support for ALD film property correction and t...
Patent number
11,236,422
Issue date
Feb 1, 2022
Lam Research Corporation
Michael Philip Roberts
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
AUTOMATED FEEDFORWARD AND FEEDBACK SEQUENCE FOR PATTERNING CD CONTROL
Publication number
20230170195
Publication date
Jun 1, 2023
LAM RESEARCH CORPORATION
Ravi Kumar
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Dual Gas Feed Showerhead for Deposition
Publication number
20230090368
Publication date
Mar 23, 2023
LAM RESEARCH CORPORATION
Michael Philip Roberts
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ASYMMETRIC PURGED BLOCK BENEATH WAFER PLANE TO MANAGE NON-UNIFORMITY
Publication number
20230009859
Publication date
Jan 12, 2023
LAM RESEARCH CORPORATION
Ramesh CHANDRASEKHARAN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
USE OF VACUUM DURING TRANSFER OF SUBSTRATES
Publication number
20220305601
Publication date
Sep 29, 2022
LAM RESEARCH CORPORATION
Ramesh CHANDRASEKHARAN
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
TEMPERATURE CONTROL OF A MULTI-ZONE PEDESTAL
Publication number
20220243332
Publication date
Aug 4, 2022
LAM RESEARCH CORPORATION
Ramesh CHANDRASEKHARAN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
USE OF ROTATION TO CORRECT FOR AZIMUTHAL NON-UNIFORMITIES IN SEMICO...
Publication number
20220243323
Publication date
Aug 4, 2022
LAM RESEARCH CORPORATION
Ramesh CHANDRASEKHARAN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
INDEPENDENTLY ADJUSTABLE FLOWPATH CONDUCTANCE IN MULTI-STATION SEMI...
Publication number
20220228263
Publication date
Jul 21, 2022
LAM RESEARCH CORPORATION
Michael Philip Roberts
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
RAPID TUNING OF CRITICAL DIMENSION NON-UNIFORMITY BY MODULATING TEM...
Publication number
20220223440
Publication date
Jul 14, 2022
LAM RESEARCH CORPORATION
Ravi KUMAR
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
TRIM AND DEPOSITION PROFILE CONTROL WITH MULTI-ZONE HEATED SUBSTRAT...
Publication number
20220205105
Publication date
Jun 30, 2022
LAM RESEARCH CORPORATION
Ramesh CHANDRASEKHARAN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PEDESTALS FOR MODULATING FILM PROPERTIES IN ATOMIC LAYER DEPOSITION...
Publication number
20220162749
Publication date
May 26, 2022
LAM RESEARCH CORPORATION
Adrien LAVOIE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ELECTROSTATIC CHUCK WITH SEAL SURFACE
Publication number
20210013080
Publication date
Jan 14, 2021
LAM RESEARCH CORPORATION
Patrick G. Breiling
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Dual Gas Feed Showerhead for Deposition
Publication number
20200024739
Publication date
Jan 23, 2020
LAM RESEARCH CORPORATION
Michael Philip Roberts
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MULTI ZONE PEDESTAL FOR ALD FILM PROPERTY CORRECTION AND TUNABILITY
Publication number
20190153600
Publication date
May 23, 2019
LAM RESEARCH CORPORATION
Michael Philip Roberts
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Wafer Edge Contact Hardware and Methods to Eliminate Deposition at...
Publication number
20180334746
Publication date
Nov 22, 2018
LAM RESEARCH CORPORATION
Patrick Breiling
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...