Mike Schlicker

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Hirschfeld, DE

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Patents Grantslast 30 patents

Information Patent Grant
System and method for optical endpoint detection during CMP by usin...
- Patent number 8,152,595
- Issue date Apr 10, 2012
- Advanced Micro Devices Inc.
- Mike Schlicker
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
SYSTEM AND METHOD FOR OPTICAL ENDPOINT DETECTION DURING CMP BY USIN...
- Publication number 20090275264
- Publication date Nov 5, 2009
- Mike Schlicker
- B24 - GRINDING POLISHING
Information Patent Application
CMP SYSTEM HAVING AN EDDY CURRENT SENSOR OF REDUCED HEIGHT
- Publication number 20080242195
- Publication date Oct 2, 2008
- Jens Heinrich
- B24 - GRINDING POLISHING