Mike Wallis

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Corralitos, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Integrated substrate processing system
- Patent number 6,637,446
- Issue date Oct 28, 2003
- Lam Research Corporation
- David T. Frost
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for applying fluid through a brush interflow distributor
- Patent number 6,464,796
- Issue date Oct 15, 2002
- Lam Research Corporation
- Jim Vail
- B08 - CLEANING
Information Patent Grant
Substrate processing in an immersion, scrub and dry system
- Patent number 6,457,199
- Issue date Oct 1, 2002
- Lam Research Corporation
- David T. Frost
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Brush interflow distributor
- Patent number 6,247,197
- Issue date Jun 19, 2001
- Lam Research Corporation
- Jim Vail
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
Apparatus and Method for Drying a Substrate
- Publication number 20100293810
- Publication date Nov 25, 2010
- Mike Wallis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR DRYING A SUBSTRATE
- Publication number 20080066339
- Publication date Mar 20, 2008
- Mike Wallis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Integrated substrate processing system
- Publication number 20020184720
- Publication date Dec 12, 2002
- Lam Research Corp.
- David T. Frost
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Brush interflow distributor
- Publication number 20020066468
- Publication date Jun 6, 2002
- Lam Research Corporation
- Jim Vail
- H01 - BASIC ELECTRIC ELEMENTS