Mikhail Haurylau

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Determining information for defects on wafers
- Patent number 10,571,407
- Issue date Feb 25, 2020
- KLA-Tencor Corp.
- Stefano Palomba
- G01 - MEASURING TESTING
Information Patent Grant
Determining information for defects on wafers
- Patent number 10,317,347
- Issue date Jun 11, 2019
- KLA-Tencor Corp.
- Stefano Palomba
- G01 - MEASURING TESTING
Information Patent Grant
Determining a configuration for an optical element positioned in a...
- Patent number 10,215,713
- Issue date Feb 26, 2019
- KLA-Tencor Corp.
- Pavel Kolchin
- G01 - MEASURING TESTING
Information Patent Grant
System and method to determine depth for optical wafer inspection
- Patent number 9,989,479
- Issue date Jun 5, 2018
- KLA-Tencor Corporation
- Pavel Kolchin
- G02 - OPTICS
Information Patent Grant
Determining a configuration for an optical element positioned in a...
- Patent number 9,709,510
- Issue date Jul 18, 2017
- KLA-Tencor Corp.
- Pavel Kolchin
- G01 - MEASURING TESTING
Information Patent Grant
System and method for apodization in a semiconductor device inspect...
- Patent number 9,645,093
- Issue date May 9, 2017
- KLA-Tencor Corporation
- Jamie M. Sullivan
- G02 - OPTICS
Information Patent Grant
System and method to determine depth for optical wafer inspection
- Patent number 9,389,349
- Issue date Jul 12, 2016
- KLA-Tencor Corporation
- Pavel Kolchin
- G01 - MEASURING TESTING
Information Patent Grant
System and method for apodization in a semiconductor device inspect...
- Patent number 9,176,069
- Issue date Nov 3, 2015
- KLA-Tencor Corporation
- Jamie M. Sullivan
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Determining Information for Defects on Wafers
- Publication number 20190257768
- Publication date Aug 22, 2019
- KLA-Tencor Corporation
- Stefano Palomba
- G01 - MEASURING TESTING
Information Patent Application
Determining a Configuration for an Optical Element Positioned in a...
- Publication number 20170292918
- Publication date Oct 12, 2017
- KLA-Tencor Corporation
- Pavel Kolchin
- G01 - MEASURING TESTING
Information Patent Application
System and Method for Apodization in a Semiconductor Device Inspect...
- Publication number 20160054232
- Publication date Feb 25, 2016
- KLA-Tencor Corporation
- Jamie M. Sullivan
- G01 - MEASURING TESTING
Information Patent Application
Determining a Configuration for an Optical Element Positioned in a...
- Publication number 20150377797
- Publication date Dec 31, 2015
- KLA-Tencor Corporation
- Pavel Kolchin
- G01 - MEASURING TESTING
Information Patent Application
Determining Information for Defects on Wafers
- Publication number 20150123014
- Publication date May 7, 2015
- KLA-Tencor Corporation
- Stefano Palomba
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM AND METHOD TO DETERMINE DEPTH FOR OPTICAL WAFER INSPECTION
- Publication number 20140268117
- Publication date Sep 18, 2014
- Pavel Kolchin
- G02 - OPTICS
Information Patent Application
System and Method for Apodization in a Semiconductor Device Inspect...
- Publication number 20140016125
- Publication date Jan 16, 2014
- KLA-Tencor Corporation
- Jamie M. Sullivan
- G02 - OPTICS

Mikhail Haurylau

Person

Patents Grantslast 30 patents

Determining information for defects on wafers

Determining information for defects on wafers

Determining a configuration for an optical element positioned in a...

System and method to determine depth for optical wafer inspection

Determining a configuration for an optical element positioned in a...

System and method for apodization in a semiconductor device inspect...

System and method to determine depth for optical wafer inspection

System and method for apodization in a semiconductor device inspect...

Patents Applicationslast 30 patents

Determining Information for Defects on Wafers

Determining a Configuration for an Optical Element Positioned in a...

System and Method for Apodization in a Semiconductor Device Inspect...

Determining a Configuration for an Optical Element Positioned in a...

Determining Information for Defects on Wafers

SYSTEM AND METHOD TO DETERMINE DEPTH FOR OPTICAL WAFER INSPECTION

System and Method for Apodization in a Semiconductor Device Inspect...