Mikhail Sergeyevich Kryvokorytov

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Moscow, RU

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Patents Grantslast 30 patents

Information Patent Grant
High-brightness LPP EUV light source
- Patent number 9,476,841
- Issue date Oct 25, 2016
- OOO “Isteq B.V.”
- Pavel Stanislavovich Antsiferov
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
HIGH-BRIGHTNESS LASER PRODUCED PLASMA SOURCE AND METHODS FOR GENERA...
- Publication number 20190166679
- Publication date May 30, 2019
- Isteq B.V.
- Aleksandr Yurievich VINOKHODOV
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR