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Mikhail Sluch
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Redmond, OR, US
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last 30 patents
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Patent Grant
Optical metrology system for spectral imaging of a sample
Patent number
9,846,122
Issue date
Dec 19, 2017
Nanometrics Incorporated
Andrzej Buczkowski
H04 - ELECTRIC COMMUNICATION TECHNIQUE
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last 30 patents
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Patent Application
OPTICAL METROLOGY SYSTEM FOR SPECTRAL IMAGING OF A SAMPLE
Publication number
20160290927
Publication date
Oct 6, 2016
Nanometrics Incorporated
Andrzej Buczkowski
G01 - MEASURING TESTING