Mikhaïl BAKLANOV

Person

Herent, BE

People

Patents Grantslast 30 patents

Information Patent Grant
Method of etching porous film
- Patent number 10,236,162
- Issue date Mar 19, 2019
- Tokyo Electron Limited
- Shigeru Tahara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for producing an integrated circuit including a metallizatio...
- Patent number 9,941,151
- Issue date Apr 10, 2018
- Imec VZW
- Liping Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of etching porous film
- Patent number 9,859,102
- Issue date Jan 2, 2018
- Tokyo Electron Limited
- Shigeru Tahara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma etching of porous substrates
- Patent number 9,595,422
- Issue date Mar 14, 2017
- Imec VZW
- Mikhaïl Baklanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for pore sealing of porous materials using polyimide langmui...
- Patent number 9,492,841
- Issue date Nov 15, 2016
- IMEC
- Victor Luchinin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for microwave treatment of dielectric films
- Patent number 9,414,445
- Issue date Aug 9, 2016
- Applied Materials, Inc.
- Iftikhar Ahmad
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for activating a porous layer surface
- Patent number 9,117,666
- Issue date Aug 25, 2015
- IMEC VZW
- Quoc Toan Le
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fabrication of porogen residues free low-k materials with improved...
- Patent number 8,974,870
- Issue date Mar 10, 2015
- IMEC
- Mikhail Baklanov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sealed porous materials, methods for making them, and semiconductor...
- Patent number 8,968,864
- Issue date Mar 3, 2015
- IMEC
- Frederik Goethals
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Protection of porous substrates before treatment
- Patent number 8,961,803
- Issue date Feb 24, 2015
- Imec VZW
- Mikhaïl Baklanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Protective treatment for porous materials
- Patent number 8,540,890
- Issue date Sep 24, 2013
- IMEC
- Mikhail Baklanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Quantification of hydrophobic and hydrophilic properties of materials
- Patent number 8,158,523
- Issue date Apr 17, 2012
- IMEC
- Adam Michal Urbanowicz
- G01 - MEASURING TESTING
Information Patent Grant
Cleaning of plasma chamber walls using noble gas cleaning step
- Patent number 7,964,039
- Issue date Jun 21, 2011
- IMEC
- Adam Michal Urbanowicz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for determining solvent permeability of films
- Patent number 7,458,251
- Issue date Dec 2, 2008
- Interuniversitair Microelektronica Centrum vzw (IMEC)
- Mikhail Baklanov
- G01 - MEASURING TESTING
Information Patent Grant
Method for the quantification of hydrophilic properties of porous m...
- Patent number 7,415,902
- Issue date Aug 26, 2008
- Interuniversitair Microelektronica Centrum (IMEC vzw)
- Mikhail Baklanov
- G01 - MEASURING TESTING
Information Patent Grant
Fluorinated hard mask for micropatterning of polymers
- Patent number 7,042,091
- Issue date May 9, 2006
- Imec VZW
- Mikhail Rodionovich Baklanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Anisotropic etching of organic-containing insulating layers
- Patent number 6,900,140
- Issue date May 31, 2005
- Interuniversitair Microelektronica Centrum (IMEC)
- Serge Vanhaelemeersch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Anisotropic etching of organic-containing insulating layers
- Patent number 6,844,267
- Issue date Jan 18, 2005
- Interuniversitair Micro-Elektronica Centrum
- Serge Vanhaelemeersch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for characterization of porous films
- Patent number 6,662,631
- Issue date Dec 16, 2003
- Interuniversitair Microelektronica Centrum
- Mikhail Rodionovich Baklanov
- G01 - MEASURING TESTING
Information Patent Grant
Metallization structure on a fluorine-containing dielectric and a m...
- Patent number 6,635,964
- Issue date Oct 21, 2003
- Interuniversitair Micro-Elektronica Centrum (IMEC vzw)
- Karen Maex
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method to produce a porous oxygen-silicon layer
- Patent number 6,593,251
- Issue date Jul 15, 2003
- Interuniversitair Microelektronica Centrum (IMEC)
- Mikhail Baklanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for determining porosity
- Patent number 6,435,008
- Issue date Aug 20, 2002
- Interuniversitair Microelecktronica Centrum
- Mikhail Rodionovich Baklanov
- G01 - MEASURING TESTING
Information Patent Grant
Metallization structure on a fluorine-containing dielectric and a m...
- Patent number 6,323,555
- Issue date Nov 27, 2001
- Interuniversitiar Microelektronica Centrum (IMEC VZW)
- Karen Maex
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for determining porosity
- Patent number 6,319,736
- Issue date Nov 20, 2001
- Interuniversitair Microelektronica Centrum (IMEC)
- Mikhail Rodionovich Baklanov
- G01 - MEASURING TESTING
Information Patent Grant
Etching process of CoSi2 layers
- Patent number 6,255,227
- Issue date Jul 3, 2001
- Interuniversitair Microelektronica Centrum
- Ricardo Alves Donaton
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fluorinated hard mask for micropatterning of polymers
- Patent number 6,245,489
- Issue date Jun 12, 2001
- Imec VZW
- Mikhail Rodionovich Baklanov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Etching process of CoSi.sub.2 layers
- Patent number 6,153,484
- Issue date Nov 28, 2000
- IMEC vzw
- Ricardo Alves Donaton
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF ETCHING POROUS FILM
- Publication number 20180082823
- Publication date Mar 22, 2018
- TOKYO ELECTRON LIMITED
- Shigeru TAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PRODUCING AN INTEGRATED CIRCUIT INCLUDING A METALLIZATIO...
- Publication number 20170301583
- Publication date Oct 19, 2017
- IMEC vzw
- Liping Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Pore Sealing of Porous Materials Using Polyimide Langmui...
- Publication number 20170021604
- Publication date Jan 26, 2017
- IMEC
- Victor Luchinin
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
METHOD OF ETCHING POROUS FILM
- Publication number 20160307732
- Publication date Oct 20, 2016
- TOKYO ELECTRON LIMITED
- Shigeru TAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ETCHING OF POROUS SUBSTRATES
- Publication number 20160276133
- Publication date Sep 22, 2016
- IMEC vzw
- Mikhaïl Baklanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR ACTIVATING A POROUS LAYER SURFACE
- Publication number 20150170910
- Publication date Jun 18, 2015
- IMEC vzw
- Quoc Toan Le
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROTECTION OF POROUS SUBSTRATES BEFORE TREATMENT
- Publication number 20150076109
- Publication date Mar 19, 2015
- IMEC vzw
- Mikhaïl Baklanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for microwave treatment of dielectric films
- Publication number 20140322921
- Publication date Oct 30, 2014
- Iftikhar Ahmad
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR ETCHING POROUS ORGANOSILICA LOW-K MATERIALS
- Publication number 20140291289
- Publication date Oct 2, 2014
- TOKYO ELECTRON LIMITED
- Frederic LAZZARINO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Pore Sealing of Porous Materials Using Polyimide Langmui...
- Publication number 20130251978
- Publication date Sep 26, 2013
- St. Petersburg Electrotechnical University
- Victor Luchinin
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
PROTECTIVE TREATMENT FOR POROUS MATERIALS
- Publication number 20130119014
- Publication date May 16, 2013
- GLOBALFOUNDERIES Inc.
- Mikhail Baklanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEALED POROUS MATERIALS, METHODS FOR MAKING THEM, AND SEMICONDUCTOR...
- Publication number 20130075876
- Publication date Mar 28, 2013
- Universiteit Gent
- Frederik Goethals
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FABRICATION OF POROGEN RESIDUES FREE LOW-K MATERIALS WITH IMPROVED...
- Publication number 20120052692
- Publication date Mar 1, 2012
- IMEC
- Mikhail Baklanov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FABRICATION OF POROGEN RESIDUES FREE AND MECHANICALLY ROBUST LOW-K...
- Publication number 20110006406
- Publication date Jan 13, 2011
- IMEC
- Adam Michal Urbanowicz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CLEANING OF PLASMA CHAMBER WALLS USING NOBLE GAS CLEANING STEP
- Publication number 20090065025
- Publication date Mar 12, 2009
- Interuniversitair Microelektronica Centrum vzw (IMEC)
- Adam Michal Urbanowicz
- B08 - CLEANING
Information Patent Application
QUANTIFICATION OF HYDROPHOBIC AND HYDROPHILIC PROPERTIES OF MATERIALS
- Publication number 20090068768
- Publication date Mar 12, 2009
- Interuniversitair Microelektronica Centrum vzw (IMEC)
- Adam Michal Urbanowicz
- G01 - MEASURING TESTING
Information Patent Application
Method for determining solvent permeability of films
- Publication number 20070148327
- Publication date Jun 28, 2007
- Mikhail Baklanov
- G01 - MEASURING TESTING
Information Patent Application
Method for the quantification of hydrophilic properties of porous m...
- Publication number 20060254374
- Publication date Nov 16, 2006
- Interuniversitair Microelektronica Centrum (IMEC vzw)
- Mikhail Baklanov
- G01 - MEASURING TESTING
Information Patent Application
Anisotropic etching of organic-containing insulating layers
- Publication number 20040175945
- Publication date Sep 9, 2004
- Serge Vanhaelemeersch
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method to produce a porous oxygen-silicon layer
- Publication number 20030181066
- Publication date Sep 25, 2003
- Mikhail Baklanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for characterization of porous films
- Publication number 20030094032
- Publication date May 22, 2003
- Mikhail Rodionovich Baklanov
- G01 - MEASURING TESTING
Information Patent Application
Metallization structure on a fluorine-containing dielectric and a m...
- Publication number 20020066957
- Publication date Jun 6, 2002
- Karen Maex
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method to produce a porous oxygen-silicon layer
- Publication number 20020022378
- Publication date Feb 21, 2002
- Mikhail Baklanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and method for determining porosity
- Publication number 20010054306
- Publication date Dec 27, 2001
- Mikhail Rodionovich Baklanov
- G01 - MEASURING TESTING
Information Patent Application
Fluorinated hard mask for micropattering of polymers
- Publication number 20010026956
- Publication date Oct 4, 2001
- Mikhail Rodionovich Baklanov
- H01 - BASIC ELECTRIC ELEMENTS

Mikhaïl BAKLANOV

Person

Patents Grantslast 30 patents

Method of etching porous film

Method for producing an integrated circuit including a metallizatio...

Method of etching porous film

Plasma etching of porous substrates

Method for pore sealing of porous materials using polyimide langmui...

Method and apparatus for microwave treatment of dielectric films

Method for activating a porous layer surface

Fabrication of porogen residues free low-k materials with improved...

Sealed porous materials, methods for making them, and semiconductor...

Protection of porous substrates before treatment

Protective treatment for porous materials

Quantification of hydrophobic and hydrophilic properties of materials

Cleaning of plasma chamber walls using noble gas cleaning step

Method for determining solvent permeability of films

Method for the quantification of hydrophilic properties of porous m...

Fluorinated hard mask for micropatterning of polymers

Anisotropic etching of organic-containing insulating layers

Anisotropic etching of organic-containing insulating layers

Method and apparatus for characterization of porous films

Metallization structure on a fluorine-containing dielectric and a m...

Method to produce a porous oxygen-silicon layer

Apparatus and method for determining porosity

Metallization structure on a fluorine-containing dielectric and a m...

Apparatus and method for determining porosity

Etching process of CoSi2 layers

Fluorinated hard mask for micropatterning of polymers

Etching process of CoSi.sub.2 layers

Patents Applicationslast 30 patents

METHOD OF ETCHING POROUS FILM

METHOD FOR PRODUCING AN INTEGRATED CIRCUIT INCLUDING A METALLIZATIO...

Method for Pore Sealing of Porous Materials Using Polyimide Langmui...

METHOD OF ETCHING POROUS FILM

PLASMA ETCHING OF POROUS SUBSTRATES

METHOD FOR ACTIVATING A POROUS LAYER SURFACE

PROTECTION OF POROUS SUBSTRATES BEFORE TREATMENT

Method and apparatus for microwave treatment of dielectric films

METHOD FOR ETCHING POROUS ORGANOSILICA LOW-K MATERIALS

Method for Pore Sealing of Porous Materials Using Polyimide Langmui...

PROTECTIVE TREATMENT FOR POROUS MATERIALS

SEALED POROUS MATERIALS, METHODS FOR MAKING THEM, AND SEMICONDUCTOR...

FABRICATION OF POROGEN RESIDUES FREE LOW-K MATERIALS WITH IMPROVED...

FABRICATION OF POROGEN RESIDUES FREE AND MECHANICALLY ROBUST LOW-K...

CLEANING OF PLASMA CHAMBER WALLS USING NOBLE GAS CLEANING STEP

QUANTIFICATION OF HYDROPHOBIC AND HYDROPHILIC PROPERTIES OF MATERIALS

Method for determining solvent permeability of films

Method for the quantification of hydrophilic properties of porous m...

Anisotropic etching of organic-containing insulating layers

Method to produce a porous oxygen-silicon layer

Method and apparatus for characterization of porous films

Metallization structure on a fluorine-containing dielectric and a m...

Method to produce a porous oxygen-silicon layer

Apparatus and method for determining porosity

Fluorinated hard mask for micropattering of polymers