Miki Aruga

Follow

Person

Yamanashi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
High-dielectric film substrate processing method
- Patent number 7,858,509
- Issue date Dec 28, 2010
- Tokyo Electron Limited
- Miki Aruga
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method of Substrate Treatment, Computer-Readable Recording Medium,...
- Publication number 20080254644
- Publication date Oct 16, 2008
- Tokyo Electron Limited
- Miki Aruga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING METHOD OF HIGH-K DIELECTRIC FILM
- Publication number 20080242113
- Publication date Oct 2, 2008
- TOKYO ELECTRON LIMITED
- Shintaro AOYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...