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Miki Ouchi
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Iwate, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Failure detection system and failure detection method
Patent number
11,526,160
Issue date
Dec 13, 2022
Tokyo Electron Limited
Yuka Nakasato
G05 - CONTROLLING REGULATING
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Patent Grant
Semiconductor manufacturing system and server device
Patent number
11,356,538
Issue date
Jun 7, 2022
Tokyo Electron Limited
Miki Ouchi
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20230422348
Publication date
Dec 28, 2023
TOKYO ELECTRON LIMITED
Yasuaki KIKUCHI
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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Patent Application
FAILURE DETECTION SYSTEM AND FAILURE DETECTION METHOD
Publication number
20210124341
Publication date
Apr 29, 2021
TOKYO ELECTRON LIMITED
Yuka NAKASATO
G05 - CONTROLLING REGULATING
Information
Patent Application
SEMICONDUCTOR MANUFACTURING SYSTEM AND SERVER DEVICE
Publication number
20190289099
Publication date
Sep 19, 2019
TOKYO ELECTRON LIMITED
Miki Ouchi
G05 - CONTROLLING REGULATING