Miki Saito

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Nagano-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate fixing device
- Patent number 11,521,885
- Issue date Dec 6, 2022
- Shinko Electric Industries Co., Ltd.
- Tadayoshi Yoshikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tray and wafer holding apparatus
- Patent number 9,837,297
- Issue date Dec 5, 2017
- Shinko Electric Industries Co., Ltd.
- Koki Tamagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dielectric layer for electrostatic chuck and electrostatic chuck
- Patent number 9,120,704
- Issue date Sep 1, 2015
- Nippon Tungsten Co., Ltd.
- Kouta Tsutsumi
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Substrate temperature regulation fixed apparatus
- Patent number 8,641,825
- Issue date Feb 4, 2014
- Shinko Electric Industries Co., Ltd.
- Hiroshi Yonekura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate temperature control fixing apparatus
- Patent number 8,505,928
- Issue date Aug 13, 2013
- Shinko Electric Industries Co., Ltd.
- Miki Saito
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE FIXING DEVICE
- Publication number 20200294838
- Publication date Sep 17, 2020
- Shinko Electric Industries Co., Ltd.
- Tadayoshi YOSHIKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRAY AND WAFER HOLDING APPARATUS
- Publication number 20150371885
- Publication date Dec 24, 2015
- Shinko Electric Industries Co., Ltd.
- Koki TAMAGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIELECTRIC LAYER FOR ELECTROSTATIC CHUCK AND ELECTROSTATIC CHUCK
- Publication number 20140103612
- Publication date Apr 17, 2014
- NIPPON TUNGSTEN CO., LTD.
- Kouta Tsutsumi
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
SUBSTRATE TEMPERATURE CONTROL FIXING APPARATUS
- Publication number 20100156055
- Publication date Jun 24, 2010
- Shinko Electric Industries Co., Ltd.
- Miki Saito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TEMPERATURE REGULATION FIXED APPARATUS
- Publication number 20090308538
- Publication date Dec 17, 2009
- Shinko Electric Industries Co., Ltd.
- Hiroshi YONEKURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...