Miki Shibata

Person

  • Fujisawa, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Polishing apparatus

    • Patent number RE38215
    • Issue date Aug 12, 2003
    • Ebara Corporation
    • Miki Shibata
    • 451 - Abrading
  • Information Patent Grant

    Polishing apparatus

    • Patent number 6,074,276
    • Issue date Jun 13, 2000
    • Ebara Corporation
    • Miki Shibata
    • B24 - GRINDING POLISHING
  • Information Patent Grant

    Polishing apparatus

    • Patent number 5,885,134
    • Issue date Mar 23, 1999
    • Ebara Corporation
    • Miki Shibata
    • B24 - GRINDING POLISHING