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Mikichi Ban
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Yokohama, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Polishing/cleaning method as well as method of making a wiring sect...
Patent number
6,776,691
Issue date
Aug 17, 2004
Canon Kabushiki Kaisha
Matsuomi Nishimura
B24 - GRINDING POLISHING
Information
Patent Grant
Precise polishing apparatus and method
Patent number
6,629,882
Issue date
Oct 7, 2003
Canon Kabushiki Kaisha
Kazuo Takahashi
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing apparatus and polishing method
Patent number
6,551,172
Issue date
Apr 22, 2003
Canon Kabushiki Kaisha
Masaru Nyui
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing method and polishing apparatus using the same
Patent number
6,503,361
Issue date
Jan 7, 2003
Canon Kabushiki Kaisha
Masaru Nyui
B24 - GRINDING POLISHING
Information
Patent Grant
Precise polishing apparatus and method
Patent number
6,390,903
Issue date
May 21, 2002
Canon Kabushiki Kaisha
Kazuo Takahashi
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing apparatus with transfer arm for moving polished object wi...
Patent number
6,332,835
Issue date
Dec 25, 2001
Canon Kabushiki Kaisha
Matsuomi Nishimura
B08 - CLEANING
Information
Patent Grant
Method of manufacturing semiconductor device using precision polish...
Patent number
6,165,050
Issue date
Dec 26, 2000
Canon Kabushiki Kaisha
Mikichi Ban
B24 - GRINDING POLISHING
Information
Patent Grant
Precision polishing method using hermetically sealed chambers
Patent number
6,149,500
Issue date
Nov 21, 2000
Canon Kabushiki Kaisha
Kazuo Takahashi
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing apparatus and polishing method
Patent number
6,142,855
Issue date
Nov 7, 2000
Canon Kabushiki Kaisha
Masaru Nyui
B24 - GRINDING POLISHING
Information
Patent Grant
Film thickness measuring method and apparatus
Patent number
6,137,575
Issue date
Oct 24, 2000
Canon Kabushiki Kaisha
Yasushi Sugiyama
G01 - MEASURING TESTING
Information
Patent Grant
Polishing method and polishing apparatus using the same
Patent number
6,093,081
Issue date
Jul 25, 2000
Canon Kabushiki Kaisha
Masaru Nyui
G05 - CONTROLLING REGULATING
Information
Patent Grant
Aberration correction system and astronomical telescope having the...
Patent number
6,038,068
Issue date
Mar 14, 2000
Canon Kabushiki Kaisha
Kunio Takeshi
G02 - OPTICS
Information
Patent Grant
Precision polishing apparatus with detecting means
Patent number
6,012,966
Issue date
Jan 11, 2000
Canon Kabushiki Kaisha
Mikichi Ban
B24 - GRINDING POLISHING
Information
Patent Grant
Method and apparatus for measuring film thickness and film thicknes...
Patent number
6,004,187
Issue date
Dec 21, 1999
Canon Kabushiki Kaisha
Masaru Nyui
B24 - GRINDING POLISHING
Information
Patent Grant
Precision polishing apparatus
Patent number
5,904,611
Issue date
May 18, 1999
Canon Kabushiki Kaisha
Kazuo Takahashi
B24 - GRINDING POLISHING
Information
Patent Grant
Depth/height measuring device
Patent number
5,087,121
Issue date
Feb 11, 1992
Canon Kabushiki Kaisha
Osamu Kakuchi
G01 - MEASURING TESTING
Information
Patent Grant
Fabri-perot spectroscopy method and apparatus utilizing the same
Patent number
4,850,709
Issue date
Jul 25, 1989
Canon Kabushiki Kaisha
Mikichi Ban
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for measuring the thickness of a thin film usi...
Patent number
4,787,749
Issue date
Nov 29, 1988
Canon Kabushiki Kaisha
Mikichi Ban
G01 - MEASURING TESTING
Information
Patent Grant
Wave front aberration measuring apparatus
Patent number
4,711,576
Issue date
Dec 8, 1987
Canon Kabushiki Kaisha
Mikichi Ban
G01 - MEASURING TESTING
Information
Patent Grant
Observing apparatus
Patent number
4,389,084
Issue date
Jun 21, 1983
Canon Kabushiki Kaisha
Mikichi Ban
G02 - OPTICS
Information
Patent Grant
Phase shifting mirror
Patent number
4,322,130
Issue date
Mar 30, 1982
Canon Kabushiki Kaisha
Susumu Ito
G02 - OPTICS
Information
Patent Grant
Image forming optical system
Patent number
4,294,538
Issue date
Oct 13, 1981
Canon Kabushiki Kaisha
Mikichi Ban
G02 - OPTICS
Patents Applications
last 30 patents
Information
Patent Application
Polishing apparatus, cleaning apparatus to be used for such a polis...
Publication number
20020052174
Publication date
May 2, 2002
Matsuomi Nishimura
B24 - GRINDING POLISHING
Information
Patent Application
Precise polishing apparatus and method
Publication number
20020019204
Publication date
Feb 14, 2002
Kazuo Takahashi
B24 - GRINDING POLISHING