Mikihito Saito

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for the inspection of patterns
- Patent number 5,173,719
- Issue date Dec 22, 1992
- Hitachi, Ltd.
- Yuzo Taniguchi
- G01 - MEASURING TESTING
Information Patent Grant
Pattern defect inspection apparatus
- Patent number 4,731,855
- Issue date Mar 15, 1988
- Hitachi, Ltd.
- Kyo Suda
- G01 - MEASURING TESTING