Mikio Deguchi

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Ehime, JP

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Patents Grantslast 30 patents

Information Patent Grant
Object processing apparatus and plasma facility comprising the same
- Patent number 7,378,062
- Issue date May 27, 2008
- Three Tec Co., Ltd.
- Ryohei Itatani
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
Object processing apparatus and plasma facility comprising the same
- Publication number 20040020598
- Publication date Feb 5, 2004
- Ryohei Itatani
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL