Mikio GOTO

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Precursor supply system and precursors supply method
- Patent number 11,819,838
- Issue date Nov 21, 2023
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Toshiyuki Nakagawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUPPLY SYSTEM FOR LOW VOLATILITY PRECURSORS
- Publication number 20240052484
- Publication date Feb 15, 2024
- L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
- Toshiyuki NAKAGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SOLID MATERIAL CONTAINER AND SOLID MATERIAL PRODUCT IN WHICH SAID S...
- Publication number 20210371977
- Publication date Dec 2, 2021
- L'Air Liquide, Société Anonyme pour l'Etude et I'Exploitation des Procédés Ge...
- Toshiyuki NAKAGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SOLID MATERIAL CONTAINER AND SOLID MATERIAL PRODUCT IN WHICH SAID S...
- Publication number 20200362456
- Publication date Nov 19, 2020
- L'Air Liquide, Societe Anonyme pour I'Etude et I'Exploitation des procedes Ge...
- Toshiyuki NAKAGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRECURSOR SUPPLY SYSTEM AND PRECURSORS SUPPLY METHOD
- Publication number 20190134586
- Publication date May 9, 2019
- L'Air Liquide, Societe Anonyme pour I'Etude et I'Exploitation des procedes Ge...
- Toshiyuki NAKAGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...