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Mikio Iwata

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  • Ibaraki, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Polishing method with error correction
    • Patent number 5,157,878
    • Issue date Oct 27, 1992
    • Canon Kabushiki Kaisha
    • Toyohiko Hiyoshi
    • G05 - CONTROLLING REGULATING
  • Information Patent Grant

    Stage mechanism
    • Patent number 5,066,131
    • Issue date Nov 19, 1991
    • Canon Kabushiki Kaisha
    • Mikio Iwata
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Polishing apparatus
    • Patent number 4,993,190
    • Issue date Feb 19, 1991
    • Canon Kabushiki Kaisha
    • Toyohiko Hiyoshi
    • G05 - CONTROLLING REGULATING