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Mikio Koizumi
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Tokyo, JP
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last 30 patents
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Patent Grant
Semiconductor wafer reaction furnace with wafer transfer means
Patent number
5,387,265
Issue date
Feb 7, 1995
Kokusai Electric Co., Ltd.
Satoshi Kakizaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...