Mikio Nagai

Follow

Person

Aichi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Radical generating method, etching method and apparatus for use in...
- Patent number 7,875,199
- Issue date Jan 25, 2011
- Showa Denko K.K.
- Toshio Goto
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...

Patents Applicationslast 30 patents

Information Patent Application
Plasma Generator
- Publication number 20080029030
- Publication date Feb 7, 2008
- Toshio Goto
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Radical generating method, etching method and apparatus for use in...
- Publication number 20070131651
- Publication date Jun 14, 2007
- Toshio Goto
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...