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Mikio Nakashima
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Koshi City, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate liquid processing apparatus and substrate liquid processi...
Patent number
11,880,213
Issue date
Jan 23, 2024
Tokyo Electron Limited
Mikio Nakashima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Processing apparatus, abnormality detection method, and storage medium
Patent number
11,094,568
Issue date
Aug 17, 2021
Tokyo Electron Limited
Kenji Nakamizo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and substrate processing apparatus a...
Patent number
11,056,357
Issue date
Jul 6, 2021
Tokyo Electron Limited
Mikio Nakashima
B08 - CLEANING
Information
Patent Grant
Substrate solution-treatment apparatus, treatment solution supplyin...
Patent number
10,937,669
Issue date
Mar 2, 2021
Tokyo Electron Limited
Kosuke Fukuda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Processing apparatus
Patent number
9,496,158
Issue date
Nov 15, 2016
Tokyo Electron Limited
Mikio Nakashima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Liquid processing apparatus
Patent number
9,348,340
Issue date
May 24, 2016
Tokyo Electron Limited
Mikio Nakashima
G05 - CONTROLLING REGULATING
Information
Patent Grant
Substrate processing apparatus, substrate processing method, and st...
Patent number
9,236,280
Issue date
Jan 12, 2016
Tokyo Electron Limited
Takayuki Toshima
B08 - CLEANING
Information
Patent Grant
Evaporator, evaporation method and substrate processing apparatus
Patent number
9,003,674
Issue date
Apr 14, 2015
Tokyo Electron Limited
Mikio Nakashima
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Substrate processing apparatus
Patent number
8,661,704
Issue date
Mar 4, 2014
Tokyo Electron Limited
Mikio Nakashima
F26 - DRYING
Information
Patent Grant
Substrate processing apparatus
Patent number
8,585,030
Issue date
Nov 19, 2013
Tokyo Electron Limited
Mikio Nakashima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Evaporator, evaporation method and substrate processing apparatus
Patent number
8,567,089
Issue date
Oct 29, 2013
Tokyo Electron Limited
Mikio Nakashima
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Evaporator, evaporation method and substrate processing apparatus
Patent number
8,281,498
Issue date
Oct 9, 2012
Tokyo Electron Limited
Mikio Nakashima
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Substrate processing method, and program storage medium therefor
Patent number
8,266,820
Issue date
Sep 18, 2012
Tokyo Electron Limited
Hideki Nishimura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method, substrate processing apparatus, and pr...
Patent number
8,020,315
Issue date
Sep 20, 2011
Tokyo Electron Limited
Hideki Nishimura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vapor drying method, apparatus and recording medium for use in the...
Patent number
7,637,029
Issue date
Dec 29, 2009
Tokyo Electron Limited
Yuji Kamikawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Fluid heating apparatus
Patent number
7,593,625
Issue date
Sep 22, 2009
Tokyo Electron Limited
Yuji Kamikawa
F28 - HEAT EXCHANGE IN GENERAL
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20240194496
Publication date
Jun 13, 2024
TOKYO ELECTRON LIMITED
Shota UMEZAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20220208567
Publication date
Jun 30, 2022
TOKYO ELECTRON LIMITED
Mikio Nakashima
B08 - CLEANING
Information
Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS AND SUBSTRATE LIQUID PROCESSI...
Publication number
20210365054
Publication date
Nov 25, 2021
TOKYO ELECTRON LIMITED
Mikio NAKASHIMA
G05 - CONTROLLING REGULATING
Information
Patent Application
SUBSTRATE SOLUTION-TREATMENT APPARATUS, TREATMENT SOLUTION SUPPLYIN...
Publication number
20180350636
Publication date
Dec 6, 2018
TOKYO ELECTRON LIMITED
Kosuke FUKUDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESSING APPARATUS, ABNORMALITY DETECTION METHOD, AND STORAGE MEDIUM
Publication number
20180308730
Publication date
Oct 25, 2018
TOKYO ELECTRON LIMITED
Kenji NAKAMIZO
G01 - MEASURING TESTING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS A...
Publication number
20170229324
Publication date
Aug 10, 2017
TOKYO ELECTRON LIMITED
Mikio NAKASHIMA
B08 - CLEANING
Information
Patent Application
LIQUID PROCESSING APPARATUS
Publication number
20150053285
Publication date
Feb 26, 2015
TOKYO ELECTRON LIMITED
Mikio NAKASHIMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EVAPORATOR, EVAPORATION METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20140020849
Publication date
Jan 23, 2014
TOKYO ELECTRON LIMITED
Mikio NAKASHIMA
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20130081297
Publication date
Apr 4, 2013
TOKYO ELECTRON LIMITED
Mikio NAKASHIMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EVAPORATOR, EVAPORATION METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20120323052
Publication date
Dec 20, 2012
Mikio NAKASHIMA
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
PROCESSING APPARATUS
Publication number
20120266925
Publication date
Oct 25, 2012
Mikio Nakashima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate Processing Apparatus, Substrate Processing Method, and St...
Publication number
20120132230
Publication date
May 31, 2012
TOKYO ELECTRON LIMITED
Takayuki Toshima
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING METHOD, AND PROGRAM STORAGE MEDIUM THEREFOR
Publication number
20110296707
Publication date
Dec 8, 2011
TOKYO ELECTRON LIMITED
Hideki NISHIMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20100078867
Publication date
Apr 1, 2010
TOKYO ELECTRON LIMITED
Mikio NAKASHIMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EVAPORATOR, EVAPORATION METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20100058606
Publication date
Mar 11, 2010
TOKYO ELECTRON LIMITED
Mikio NAKASHIMA
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
Substrate processing method, substrate processing apparatus, and pr...
Publication number
20080060214
Publication date
Mar 13, 2008
Hideki Nishimura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Fluid heating apparatus
Publication number
20070017502
Publication date
Jan 25, 2007
Yuji Kamikawa
F28 - HEAT EXCHANGE IN GENERAL
Information
Patent Application
Vapor drying method, apparatus and recording medium for use in the...
Publication number
20070006483
Publication date
Jan 11, 2007
TOKYO ELECTRON LIMITED
Yuji Kamikawa
H01 - BASIC ELECTRIC ELEMENTS