Mikio Sakuma

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Wafer surface observation apparatus
- Patent number 7,565,002
- Issue date Jul 21, 2009
- Tokyo Seimitsu Co., Ltd.
- Hiroyuki Yasutomi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Wafer observation position designating apparatus and wafer display...
- Publication number 20050105790
- Publication date May 19, 2005
- Hiroyuki Yasutomi
- H01 - BASIC ELECTRIC ELEMENTS