Mikio Segawa

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
EFEM
- Patent number 9,704,727
- Issue date Jul 11, 2017
- Sinfonia Technology Co., Ltd.
- Mikio Segawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Atmosphere replacement apparatus, substrate transport apparatus, su...
- Patent number 9,412,634
- Issue date Aug 9, 2016
- Sinfonia Technology Co., Ltd.
- Mikio Segawa
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
EFEM
- Publication number 20150170945
- Publication date Jun 18, 2015
- SINFONIA TECHNOLOGY CO., LTD.
- Mikio Segawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ATMOSPHERE REPLACEMENT APPARATUS, SUBSTRATE TRANSPORT APPARATUS, SU...
- Publication number 20150128441
- Publication date May 14, 2015
- SINFONIA TECHNOLOGY CO., LTD.
- Mikio Segawa
- H01 - BASIC ELECTRIC ELEMENTS