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Mikio Suzuki

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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    SURFACE PROCESSING METHOD AND PROCESSING SYSTEM
    • Publication number 20220301882
    • Publication date Sep 22, 2022
    • TOKYO ELECTRON LIMITED
    • Koichi TAKATSUKI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SURFACE PROCESSING METHOD AND PROCESSING SYSTEM
    • Publication number 20200111675
    • Publication date Apr 9, 2020
    • TOKYO ELECTRON LIMITED
    • Koichi TAKATSUKI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD FOR FORMING TUNGSTEN FILM
    • Publication number 20190161853
    • Publication date May 30, 2019
    • TOKYO ELECTRON LIMITED
    • Shintaro Aoyama
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD OF FORMING TUNGSTEN FILM
    • Publication number 20180315649
    • Publication date Nov 1, 2018
    • TOKYO ELECTRON LIMITED
    • Koji Maekawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    TUNGSTEN FILM FORMING METHOD
    • Publication number 20180312972
    • Publication date Nov 1, 2018
    • TOKYO ELECTRON LIMITED
    • Koji MAEKAWA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METAL HARD MASK AND METHOD OF MANUFACTURING SAME
    • Publication number 20170287727
    • Publication date Oct 5, 2017
    • TOKYO ELECTRON LIMITED
    • Yuuki KIKUCHI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    NI FILM FORMING METHOD
    • Publication number 20120183689
    • Publication date Jul 19, 2012
    • TOKYO ELECTRON LIMITED
    • Mikio Suzuki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METAL SILICIDE FILM FORMING METHOD
    • Publication number 20120171863
    • Publication date Jul 5, 2012
    • TOKYO ELECTRON LIMITED
    • Mikio Suzuki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS AND METHOD, AND GAS NOZZLE FOR IMPRO...
    • Publication number 20090133627
    • Publication date May 28, 2009
    • TOKYO ELECTRON LIMITED
    • Hiroshi Shinriki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD OF INTEGRATING METAL-CONTAINING FILMS INTO SEMICONDUCTOR DEV...
    • Publication number 20080119033
    • Publication date May 22, 2008
    • TOKYO ELECTRON LIMITED
    • Shigeo Ashigaki
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Method of cleaning substrate-processing device and substrate-proces...
    • Publication number 20060175011
    • Publication date Aug 10, 2006
    • Hiroshi Shinriki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Substrate processing apparatus and method, and gas nozzle for impro...
    • Publication number 20060032445
    • Publication date Feb 16, 2006
    • TOKYO ELECTRON LIMITED
    • Hiroshi Shinriki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...