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Photomask blank and photomask
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Patent number 8,007,964
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Issue date Aug 30, 2011
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Shin-Etsu Chemical Co., Ltd.
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Hiroki Yoshikawa
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Photomask blank and photomask
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Patent number 7,691,546
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Issue date Apr 6, 2010
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Shin-Etsu Chemical Co., Ltd.
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Hiroki Yoshikawa
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Vapor phase growth method
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Patent number 4,539,068
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Issue date Sep 3, 1985
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Fujitsu Limited
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Mikio Takagi
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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