Mikio Ushijima

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Kumagaya-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate bonding apparatus and substrate bonding method
- Patent number 11,791,223
- Issue date Oct 17, 2023
- Nikon Corporation
- Isao Sugaya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reticle-focus detector, and charged-particle-beam microlithography...
- Patent number 6,768,124
- Issue date Jul 27, 2004
- Nikon Corporation
- Kazuaki Suzuki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE CORRECTION DEVICE, SUBSTRATE LAMINATION DEVICE, SUBSTRATE...
- Publication number 20240404859
- Publication date Dec 5, 2024
- Nikon Corporation
- Mikio USHIJIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE BONDING APPARATUS AND SUBSTRATE BONDING METHOD
- Publication number 20240014079
- Publication date Jan 11, 2024
- Nikon Corporation
- Isao SUGAYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE BONDING APPARATUS AND SUBSTRATE BONDING METHOD
- Publication number 20180308770
- Publication date Oct 25, 2018
- Nikon Corporation
- Isao SUGAYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR MANAGING A HOLDER, APPARATUS FOR MANUFACTURING A LAYE...
- Publication number 20110288674
- Publication date Nov 24, 2011
- Isao Sugaya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Reticle-focus detector, and charged-particle-beam microlithography...
- Publication number 20020000524
- Publication date Jan 3, 2002
- NIKON CORPORATION
- Kazuaki Suzuki
- B82 - NANO-TECHNOLOGY