Mikko Ritala

Person

Espoo, FI

People

Patents Grantslast 30 patents

Information Patent Grant
Method of forming a transition metal containing film on a substrate...
- Patent number 12,173,402
- Issue date Dec 24, 2024
- ASM IP Holding B.V.
- Timo Hatanpää
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for filling a gap feature on a substrate surface and relate...
- Patent number 12,119,220
- Issue date Oct 15, 2024
- ASM IP Holding B.V.
- Leo Salmi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for forming a metallic film on a substrate by cyclical depo...
- Patent number 12,106,965
- Issue date Oct 1, 2024
- ASM IP Holding B.V.
- Katja Väyrynen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor deposition processes
- Patent number 12,104,250
- Issue date Oct 1, 2024
- ASM IP Holding B.V.
- Timo Hatanpää
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor deposition processes
- Patent number 12,065,739
- Issue date Aug 20, 2024
- ASM IP Holding B.V.
- Timo Hatanpää
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of forming a transition metal containing film on a substrat...
- Patent number 11,959,171
- Issue date Apr 16, 2024
- ASM IP Holding B.V.
- Timo Hatanpää
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cyclic deposition methods for forming metal-containing material and...
- Patent number 11,952,658
- Issue date Apr 9, 2024
- ASM IP Holding B.V.
- Katja Väyrynen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition of rhenium containing thin films
- Patent number 11,821,084
- Issue date Nov 21, 2023
- ASM IP Holding, B.V.
- Jani Hamalainen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Synthesis and use of precursors for ALD of tellurium and selenium t...
- Patent number 11,814,400
- Issue date Nov 14, 2023
- ASM International N.V.
- Viljami Pore
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cyclic deposition methods for forming metal-containing material and...
- Patent number 11,814,715
- Issue date Nov 14, 2023
- ASM IP Holding B.V.
- Katja Väyrynen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Area selective organic material removal
- Patent number 11,694,903
- Issue date Jul 4, 2023
- ASM IP Holding B.V.
- Mikko Ritala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Synthesis and use of precursors for vapor deposition of tungsten co...
- Patent number 11,667,595
- Issue date Jun 6, 2023
- ASM IP Holding B.V.
- Timo Hatanpää
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition and etching of transition metal dichalcogen...
- Patent number 11,643,728
- Issue date May 9, 2023
- ASM IP Holding B.V.
- Jani Hämäläinen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Synthesis and use of precursors for ALD of molybdenum or tungsten c...
- Patent number 11,624,112
- Issue date Apr 11, 2023
- ASM IP Holding B.V.
- Tiina McKee
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Precursors and methods for atomic layer deposition of transition me...
- Patent number 11,555,242
- Issue date Jan 17, 2023
- ASM International N.V.
- Timo Hatanpaa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Synthesis and use of precursors for ALD of group VA element contain...
- Patent number 11,542,600
- Issue date Jan 3, 2023
- ASM IP Holding B.V.
- Viljami Pore
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for filling a gap feature on a substrate surface and relate...
- Patent number 11,527,403
- Issue date Dec 13, 2022
- ASM IP Holding B.V.
- Leo Salmi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vapor deposition of thin films comprising gold
- Patent number 11,499,227
- Issue date Nov 15, 2022
- ASM IP Holding B.V.
- Maarit Mäkelä
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cyclic deposition methods for forming metal-containing material and...
- Patent number 11,499,222
- Issue date Nov 15, 2022
- ASM IP Holding B.V.
- Katja Väyrynen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cyclic deposition methods for forming metal-containing material and...
- Patent number 11,492,703
- Issue date Nov 8, 2022
- ASM IP Holding B.V.
- Katja Väyrynen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for forming a metallic film on a substrate by cyclical depo...
- Patent number 11,410,851
- Issue date Aug 9, 2022
- ASM IP Holding B.V.
- Katja Väyrynen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of forming a transition metal containing film on a substrat...
- Patent number 11,390,946
- Issue date Jul 19, 2022
- ASM IP Holding B.V.
- Timo Hatanpää
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing a transition metal chalcogenide film on a su...
- Patent number 11,244,825
- Issue date Feb 8, 2022
- ASM IP Holding B.V.
- Miika Mattinen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Atomic layer deposition of rhenium containing thin films
- Patent number 11,155,917
- Issue date Oct 26, 2021
- ASM IP Holding B.V.
- Jani Hamalainen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Synthesis and use of precursors for ALD of tellurium and selenium t...
- Patent number 11,072,622
- Issue date Jul 27, 2021
- ASM International N.V.
- Viljami Pore
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vapor deposition of thin films comprising gold
- Patent number 11,047,046
- Issue date Jun 29, 2021
- ASM IP Holding B.V.
- Maarit Mäkelä
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Synthesis and use of precursors for ALD of molybdenum or tungsten c...
- Patent number 11,047,042
- Issue date Jun 29, 2021
- ASM IP Holding B.V.
- Tiina McKee
- G01 - MEASURING TESTING
Information Patent Grant
Synthesis and use of precursors for vapor deposition of tungsten co...
- Patent number 11,014,866
- Issue date May 25, 2021
- ASM IP Holding B.V.
- Timo Hatanpää
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Synthesis and use of precursors for ALD of group VA element contain...
- Patent number 10,941,487
- Issue date Mar 9, 2021
- ASM IP Holding B.V.
- Viljami Pore
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for depositing a transition metal chalcogenide film on a su...
- Patent number 10,847,366
- Issue date Nov 24, 2020
- ASM IP Holding B.V.
- Miika Mattinen
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
VAPOR DEPOSITION PROCESSES
- Publication number 20240417852
- Publication date Dec 19, 2024
- ASM IP HOLDING B.V.
- Timo Hatanpää
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Vapor Deposition Processes
- Publication number 20240368763
- Publication date Nov 7, 2024
- ASM IP HOLDING B.V.
- Timo Hatanpää
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and system for depositing transition metal carbide
- Publication number 20240279800
- Publication date Aug 22, 2024
- ASM IP HOLDING B.V.
- Timo Hatanpää
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND SYSTEM FOR DEPOSITING NOBLE METAL-CONTAINING LAYER
- Publication number 20240279805
- Publication date Aug 22, 2024
- ASM IP HOLDING B.V.
- Timo Hatanpää
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE DEPOSITION OF MATERIAL COMPRISING NOBLE METAL
- Publication number 20230407476
- Publication date Dec 21, 2023
- ASM IP HOLDING B.V.
- Mikko RITALA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AREA SELECTIVE ORGANIC MATERIAL REMOVAL
- Publication number 20230307247
- Publication date Sep 28, 2023
- ASM IP HOLDING B.V.
- Mikko Ritala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYNTHESIS AND USE OF PRECURSORS FOR VAPOR DEPOSITION OF TUNGSTEN CO...
- Publication number 20230265035
- Publication date Aug 24, 2023
- ASM IP HOLDING B.V.
- Timo Hatanpää
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER DEPOSITION AND ETCHING OF TRANSITION METAL DICHALCOGEN...
- Publication number 20230250534
- Publication date Aug 10, 2023
- ASM IP HOLDING B.V.
- Jani Hämäläinen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR DEPOSITION PROCESSES AND A DEPOSITION ASSEMBLY
- Publication number 20230245899
- Publication date Aug 3, 2023
- ASM IP HOLDING, B.V.
- Georgi Popov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYNTHESIS AND USE OF PRECURSORS FOR ALD OF MOLYBDENUM OR TUNGSTEN C...
- Publication number 20230227977
- Publication date Jul 20, 2023
- ASM IP HOLDING B.V.
- Tiina McKee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR DEPOSITION OF THIN FILMS COMPRISING GOLD
- Publication number 20230175132
- Publication date Jun 8, 2023
- ASM IP HOLDING B.V.
- Maarit Mäkelä
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR FILLING A GAP FEATURE ON A SUBSTRATE SURFACE AND RELATE...
- Publication number 20230170207
- Publication date Jun 1, 2023
- ASM IP HOLDING B.V.
- Leo Salmi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYNTHESIS AND USE OF PRECURSORS FOR ALD OF GROUP VA ELEMENT CONTAIN...
- Publication number 20230093384
- Publication date Mar 23, 2023
- ASM IP HOLDING B.V.
- Viljami Pore
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Vapor Deposition Processes
- Publication number 20230064120
- Publication date Mar 2, 2023
- ASM IP HOLDING, B.V.
- Timo Hatanpää
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Vapor Deposition Processes
- Publication number 20230063199
- Publication date Mar 2, 2023
- ASM IP HOLDING, B.V.
- Timo Hatanpää
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CYCLIC DEPOSITION METHODS FOR FORMING METAL-CONTAINING MATERIAL AND...
- Publication number 20230067660
- Publication date Mar 2, 2023
- ASM IP HOLDING B.V.
- Katja Väyrynen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF FORMING A TRANSITION METAL CONTAINING FILM ON A SUBSTRAT...
- Publication number 20220411931
- Publication date Dec 29, 2022
- ASM IP HOLDING B.V.
- Timo Hatanpää
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CYCLIC DEPOSITION METHODS FOR FORMING METAL-CONTAINING MATERIAL AND...
- Publication number 20220389583
- Publication date Dec 8, 2022
- ASM IP HOLDING B.V.
- Katja Väyrynen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR FORMING A METALLIC FILM ON A SUBSTRATE BY CYCLICAL DEPO...
- Publication number 20220367195
- Publication date Nov 17, 2022
- ASM IP HOLDING B.V.
- Katja Väyrynen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION OF TRANSITION METAL -COMPRISING MATERIAL
- Publication number 20220251701
- Publication date Aug 11, 2022
- ASM IP HOLDING B.V.
- Miika Mattinen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR DEPOSITING A TRANSITION METAL CHALCOGENIDE FILM ON A SU...
- Publication number 20220115232
- Publication date Apr 14, 2022
- ASM IP HOLDING B.V.
- Miika Mattinen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ATOMIC LAYER DEPOSITION OF RHENIUM CONTAINING THIN FILMS
- Publication number 20220002868
- Publication date Jan 6, 2022
- ASM IP HOLDING B.V.
- Jani Hamalainen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AREA SELECTIVE ORGANIC MATERIAL REMOVAL
- Publication number 20210407818
- Publication date Dec 30, 2021
- ASM IP HOLDING B.V.
- Mikko Ritala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ATOMIC LAYER DEPOSITION AND ETCHING OF TRANSITION METAL DICHALCOGEN...
- Publication number 20210388503
- Publication date Dec 16, 2021
- ASM IP HOLDING B.V.
- Jani Hämäläinen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYNTHESIS AND USE OF PRECURSORS FOR ALD OF TELLURIUM AND SELENIUM T...
- Publication number 20210347795
- Publication date Nov 11, 2021
- ASM INTERNATIONAL N.V.
- Viljami Pore
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CYCLIC DEPOSITION METHODS FOR FORMING METAL-CONTAINING MATERIAL AND...
- Publication number 20210317576
- Publication date Oct 14, 2021
- ASM IP HOLDING B.V.
- Katja Väyrynen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR DEPOSITION OF THIN FILMS COMPRISING GOLD
- Publication number 20210277519
- Publication date Sep 9, 2021
- ASM IP HOLDING B.V.
- Maarit Mäkelä
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYNTHESIS AND USE OF PRECURSORS FOR ALD OF MOLYBDENUM OR TUNGSTEN C...
- Publication number 20210269915
- Publication date Sep 2, 2021
- ASM IP HOLDING B.V.
- Tiina McKee
- C01 - INORGANIC CHEMISTRY
Information Patent Application
CYCLIC DEPOSITION METHODS FOR FORMING METAL-CONTAINING MATERIAL AND...
- Publication number 20210269914
- Publication date Sep 2, 2021
- ASM IP HOLDING B.V.
- Katja Väyrynen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYNTHESIS AND USE OF PRECURSORS FOR VAPOR DEPOSITION OF TUNGSTEN CO...
- Publication number 20210246095
- Publication date Aug 12, 2021
- ASM IP HOLDING B.V.
- Timo Hatanpää
- C07 - ORGANIC CHEMISTRY

Mikko Ritala

Person

Patents Grantslast 30 patents

Method of forming a transition metal containing film on a substrate...

Methods for filling a gap feature on a substrate surface and relate...

Methods for forming a metallic film on a substrate by cyclical depo...

Vapor deposition processes

Vapor deposition processes

Methods of forming a transition metal containing film on a substrat...

Cyclic deposition methods for forming metal-containing material and...

Atomic layer deposition of rhenium containing thin films

Synthesis and use of precursors for ALD of tellurium and selenium t...

Cyclic deposition methods for forming metal-containing material and...

Area selective organic material removal

Synthesis and use of precursors for vapor deposition of tungsten co...

Atomic layer deposition and etching of transition metal dichalcogen...

Synthesis and use of precursors for ALD of molybdenum or tungsten c...

Precursors and methods for atomic layer deposition of transition me...

Synthesis and use of precursors for ALD of group VA element contain...

Methods for filling a gap feature on a substrate surface and relate...

Vapor deposition of thin films comprising gold

Cyclic deposition methods for forming metal-containing material and...

Cyclic deposition methods for forming metal-containing material and...

Methods for forming a metallic film on a substrate by cyclical depo...

Methods of forming a transition metal containing film on a substrat...

Methods for depositing a transition metal chalcogenide film on a su...

Atomic layer deposition of rhenium containing thin films

Synthesis and use of precursors for ALD of tellurium and selenium t...

Vapor deposition of thin films comprising gold

Synthesis and use of precursors for ALD of molybdenum or tungsten c...

Synthesis and use of precursors for vapor deposition of tungsten co...

Synthesis and use of precursors for ALD of group VA element contain...

Methods for depositing a transition metal chalcogenide film on a su...

Patents Applicationslast 30 patents

VAPOR DEPOSITION PROCESSES

Vapor Deposition Processes

Method and system for depositing transition metal carbide

METHOD AND SYSTEM FOR DEPOSITING NOBLE METAL-CONTAINING LAYER

SELECTIVE DEPOSITION OF MATERIAL COMPRISING NOBLE METAL

AREA SELECTIVE ORGANIC MATERIAL REMOVAL

SYNTHESIS AND USE OF PRECURSORS FOR VAPOR DEPOSITION OF TUNGSTEN CO...

ATOMIC LAYER DEPOSITION AND ETCHING OF TRANSITION METAL DICHALCOGEN...

VAPOR DEPOSITION PROCESSES AND A DEPOSITION ASSEMBLY

SYNTHESIS AND USE OF PRECURSORS FOR ALD OF MOLYBDENUM OR TUNGSTEN C...

VAPOR DEPOSITION OF THIN FILMS COMPRISING GOLD

METHODS FOR FILLING A GAP FEATURE ON A SUBSTRATE SURFACE AND RELATE...

SYNTHESIS AND USE OF PRECURSORS FOR ALD OF GROUP VA ELEMENT CONTAIN...

Vapor Deposition Processes

Vapor Deposition Processes

CYCLIC DEPOSITION METHODS FOR FORMING METAL-CONTAINING MATERIAL AND...

METHODS OF FORMING A TRANSITION METAL CONTAINING FILM ON A SUBSTRAT...

CYCLIC DEPOSITION METHODS FOR FORMING METAL-CONTAINING MATERIAL AND...

METHODS FOR FORMING A METALLIC FILM ON A SUBSTRATE BY CYCLICAL DEPO...

DEPOSITION OF TRANSITION METAL -COMPRISING MATERIAL

METHODS FOR DEPOSITING A TRANSITION METAL CHALCOGENIDE FILM ON A SU...

ATOMIC LAYER DEPOSITION OF RHENIUM CONTAINING THIN FILMS

AREA SELECTIVE ORGANIC MATERIAL REMOVAL

ATOMIC LAYER DEPOSITION AND ETCHING OF TRANSITION METAL DICHALCOGEN...

SYNTHESIS AND USE OF PRECURSORS FOR ALD OF TELLURIUM AND SELENIUM T...

CYCLIC DEPOSITION METHODS FOR FORMING METAL-CONTAINING MATERIAL AND...

VAPOR DEPOSITION OF THIN FILMS COMPRISING GOLD

SYNTHESIS AND USE OF PRECURSORS FOR ALD OF MOLYBDENUM OR TUNGSTEN C...

CYCLIC DEPOSITION METHODS FOR FORMING METAL-CONTAINING MATERIAL AND...

SYNTHESIS AND USE OF PRECURSORS FOR VAPOR DEPOSITION OF TUNGSTEN CO...