Milan PLISKA

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Patents Grantslast 30 patents

Information Patent Grant
Reduction of surface and embedded substrate charge by controlled ex...
- Patent number 10,483,010
- Issue date Nov 19, 2019
- Lam Research AG
- Rafal Dylewicz
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Apparatus for liquid treatment of wafer shaped articles
- Patent number 9,972,514
- Issue date May 15, 2018
- LAM RESEARCH AG
- Dietmar Hammer
- B08 - CLEANING
Information Patent Grant
Apparatus for liquid treatment of wafer shaped articles
- Patent number 9,779,979
- Issue date Oct 3, 2017
- Lam Research AG
- Reinhold Schwarzenbacher
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SPIN CHUCK INCLUDING EDGE RING
- Publication number 20180096879
- Publication date Apr 5, 2018
- LAM RESEARCH AG
- Shih-Chung KON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REDUCTION OF SURFACE AND EMBEDDED SUBSTRATE CHARGE BY CONTROLLED EX...
- Publication number 20180068754
- Publication date Mar 8, 2018
- LAM RESEARCH AG
- Rafal Dylewicz
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES
- Publication number 20180040502
- Publication date Feb 8, 2018
- LAM RESEARCH AG
- Shih-Chung KON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR LIQUID TREATMENT OF WAFER SHAPED ARTICLES
- Publication number 20170256433
- Publication date Sep 7, 2017
- LAM RESEARCH AG
- Dietmar HAMMER
- B08 - CLEANING
Information Patent Application
DUAL MODE CHAMBER FOR PROCESSING WAFER-SHAPED ARTICLES
- Publication number 20160376702
- Publication date Dec 29, 2016
- LAM RESEARCH AG
- Karl-Heinz HOHENWARTER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR LIQUID TREATMENT OF WAFER SHAPED ARTICLES
- Publication number 20150243543
- Publication date Aug 27, 2015
- LAM RESEARCH AG
- Reinhold SCHWARZENBACHER
- H01 - BASIC ELECTRIC ELEMENTS