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Min Melissa Yu
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San Jose, CA, US
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last 30 patents
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Patent Grant
Integrated low K dielectrics and etch stops
Patent number
6,858,153
Issue date
Feb 22, 2005
Applied Materials Inc.
Claes H. Bjorkman
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Integrated low k dielectrics and etch stops
Patent number
6,669,858
Issue date
Dec 30, 2003
Applied Materials Inc.
Claes H. Bjorkman
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for etching low K dielectric layers
Patent number
6,387,819
Issue date
May 14, 2002
Applied Materials, Inc.
Min Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Integrated low K dielectrics and etch stops
Patent number
6,340,435
Issue date
Jan 22, 2002
Applied Materials, Inc.
Claes H. Bjorkman
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...