Min Sub Oh

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Daejeon, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma enhanced atomic layer deposition (PEALD) equipment and metho...
- Patent number 7,138,336
- Issue date Nov 21, 2006
- ASM Genitech Korea Ltd.
- Chun Soo Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...