Min Xiang

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Shanghai, CN

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for determining dielectric layer properties
- Patent number 8,004,290
- Issue date Aug 23, 2011
- KLA-Tencor Corporation
- Xiafang Zhang
- G01 - MEASURING TESTING
Information Patent Grant
Substrate conditioning for corona charge control
- Patent number 7,724,003
- Issue date May 25, 2010
- KLA-Tencor Corporation
- NanChang Zhu
- H01 - BASIC ELECTRIC ELEMENTS