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Min-Yeong Moon
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Ann Arbor, MI, US
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Patents Grants
last 30 patents
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Patent Grant
Self-calibrating overlay metrology
Patent number
11,880,142
Issue date
Jan 23, 2024
KLA Corporation
Stilian Pandev
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Self-calibrated overlay metrology using a skew training sample
Patent number
11,604,063
Issue date
Mar 14, 2023
KLA Corporation
Stilian Pandev
G01 - MEASURING TESTING
Information
Patent Grant
Self-calibrating overlay metrology
Patent number
11,604,420
Issue date
Mar 14, 2023
KLA Corporation
Stilian Pandev
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Methods and systems for determining quality of semiconductor measur...
Patent number
11,530,913
Issue date
Dec 20, 2022
KLA Corporation
Dzmitry Sanko
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
CORRECTING TARGET LOCATIONS FOR TEMPERATURE IN SEMICONDUCTOR APPLIC...
Publication number
20240120221
Publication date
Apr 11, 2024
KLA Corporation
Min-Yeong Moon
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ESTIMATING IN-DIE OVERLAY WITH TOOL INDUCED SHIFT CORRECTION
Publication number
20230258446
Publication date
Aug 17, 2023
KLA Corporation
Min-Yeong MOON
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SELF-CALIBRATING OVERLAY METROLOGY
Publication number
20230221656
Publication date
Jul 13, 2023
KLA Corporation
Stilian Pandev
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SELF-CALIBRATED OVERLAY METROLOGY USING A SKEW TRAINING SAMPLE
Publication number
20220412734
Publication date
Dec 29, 2022
Stilian Pandev
G01 - MEASURING TESTING
Information
Patent Application
Methods And Systems For Measurement Of Tilt And Overlay Of A Structure
Publication number
20220404143
Publication date
Dec 22, 2022
KLA Corporation
Stilian Ivanov Pandev
G01 - MEASURING TESTING
Information
Patent Application
SELF-CALIBRATING OVERLAY METROLOGY
Publication number
20220357673
Publication date
Nov 10, 2022
Stilian Pandev
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Methods And Systems For Determining Quality Of Semiconductor Measur...
Publication number
20220090912
Publication date
Mar 24, 2022
KLA Corporation
Dzmitry Sanko
G01 - MEASURING TESTING