Mineo Gotou

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Kawasaki, JP

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Patents Grantslast 30 patents

Information Patent Grant
Vacuum device for handling workpieces
- Patent number 4,948,979
- Issue date Aug 14, 1990
- Kabushiki Kaisha Toshiba
- Yasuo Munakata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for drawing a pattern by charged beam and its apparatus
- Patent number 4,728,797
- Issue date Mar 1, 1988
- Kabushiki Kaisha Toshiba
- Mineo Gotou
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method of positioning a beam to a specific portion of a semiconduct...
- Patent number 4,636,968
- Issue date Jan 13, 1987
- Kabushiki Kaisha Toshiba
- Mineo Gotou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming by projection an integrated circuit pattern on a...
- Patent number 4,621,371
- Issue date Nov 4, 1986
- Tokyo Shibaura Denki Kabushiki Kaisha
- Mineo Gotou
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Target body position measuring method for charged particle beam fin...
- Patent number 4,558,225
- Issue date Dec 10, 1985
- Tokyo Shibaura Denki Kabushiki Kaisha
- Mineo Gotou
- H01 - BASIC ELECTRIC ELEMENTS