Mineo Shimizu

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Kanagawa, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate cleaning method and substrate cleaning apparatus
- Patent number 7,255,749
- Issue date Aug 14, 2007
- Sony Corporation
- Yasuhito Inagaki
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
Substrate cleaning method and substrate cleaning apparatus
- Publication number 20050022845
- Publication date Feb 3, 2005
- Sony Corporation
- Yasuhito Inagaki
- B08 - CLEANING
Information Patent Application
Substrate cleaning method and substrate cleaning apparatus
- Publication number 20020046757
- Publication date Apr 25, 2002
- Yasuhito Inagaki
- H01 - BASIC ELECTRIC ELEMENTS