Ming-Chun Chou

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Vancouver, WA, US

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Patents Grantslast 30 patents

Information Patent Grant
Automatic in situ pellicle height measurement system
- Patent number 6,778,285
- Issue date Aug 17, 2004
- Wafertech, Inc.
- Phong Nguyen
- G01 - MEASURING TESTING
Information Patent Grant
Method for forming a critical dimension SEM calibration standard of...
- Patent number 6,420,703
- Issue date Jul 16, 2002
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chia-Fang Wu
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Brush positioning device for a wafer cleaning station
- Publication number 20050229950
- Publication date Oct 20, 2005
- Ming-Chun Chou
- B08 - CLEANING