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Hsinchu City, TW
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Patents Grants
last 30 patents
Information
Patent Grant
Sputtering target assembly to prevent overetch of backing plate and...
Patent number
11,557,470
Issue date
Jan 17, 2023
Taiwan Semiconductor Manufacturing Company Limited
Chen-Fang Chung
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Sputtering target assembly to prevent overetch of backing plate and...
Patent number
11,424,111
Issue date
Aug 23, 2022
Taiwan Semiconductor Manufacturing Company Limited
Chen-Fang Chung
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Systems and methods for uniform target erosion magnetic assemblies
Patent number
11,390,520
Issue date
Jul 19, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Chen-Fang Chung
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sputter target magnet
Patent number
11,322,338
Issue date
May 3, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Ming-Jie He
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
SPUTTERING TARGET ASSEMBLY TO PREVENT OVERETCH OF BACKING PLATE AND...
Publication number
20220351953
Publication date
Nov 3, 2022
Taiwan Semiconductor Manufacturing Company Limited
Chen-Fang Chung
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SPUTTER TARGET MAGNET
Publication number
20220223391
Publication date
Jul 14, 2022
Taiwan Semiconductor Manufacturing Co., LTD
Ming-Jie HE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SPUTTERING TARGET ASSEMBLY TO PREVENT OVERETCH OF BACKING PLATE AND...
Publication number
20210407777
Publication date
Dec 30, 2021
Taiwan Semiconductor Manufacturing Company Limited
Chen-Fang Chung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SPUTTER TARGET MAGNET
Publication number
20190066988
Publication date
Feb 28, 2019
Taiwan Semiconductor Manufacturing Co., LTD
Ming-Jie HE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SYSTEMS AND METHODS FOR UNIFORM TARGET EROSION MAGNETIC ASSEMBLIES
Publication number
20190035611
Publication date
Jan 31, 2019
Taiwan Semiconductor Manufactyring Co., Ltd.
Chen-Fang Chung
H01 - BASIC ELECTRIC ELEMENTS