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Ming-Li Kung
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Kee-Lung City, TW
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Patents Grants
last 30 patents
Information
Patent Grant
Dry clean method instead of traditional wet clean after metal etch
Patent number
6,526,996
Issue date
Mar 4, 2003
Promos Technologies, Inc.
Hong-Long Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of forming tungsten interconnect and vias without tungsten l...
Patent number
6,410,417
Issue date
Jun 25, 2002
ProMos Technologies, Inc.
Nien-Yu Tsai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of forming tungsten interconnect with tungsten oxidation to...
Patent number
6,143,653
Issue date
Nov 7, 2000
ProMOS Technologies, Inc.
Nien-Yu Tsai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for improving etch uniformity during a wet etching process
Patent number
6,123,865
Issue date
Sep 26, 2000
ProMOS Technologies, Inc.
Wei-Chih Lin
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Dry clean method instead of traditional wet clean after metal etch
Publication number
20030104697
Publication date
Jun 5, 2003
ProMOS Technologies, Inc.
Hong-Long Chang
H01 - BASIC ELECTRIC ELEMENTS