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Ming Lu
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Stony Brook, NY, US
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last 30 patents
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Patent Grant
Inorganic-infiltrated polymer hybrid thin film resists for advanced...
Patent number
12,140,865
Issue date
Nov 12, 2024
Brookhaven Science Associates, LLC
Chang-Yong Nam
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
Inorganic-Infiltrated Polymer Hybrid Thin Film Resists for Advanced...
Publication number
20200285148
Publication date
Sep 10, 2020
Brookhaven Science Associates, LLC
Chang-Yong Nam
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...