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Hsin-Chu, TW
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Patents Grants
last 30 patents
Information
Patent Grant
Wafer process chamber leak detector
Patent number
8,530,242
Issue date
Sep 10, 2013
Taiwan Semiconductor Manufacturing Company, Ltd.
George Lin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Automatic methods and systems for manufacturing recipe feedback con...
Patent number
7,313,450
Issue date
Dec 25, 2007
Taiwan Semiconductor Manufacturing Co., Ltd.
Ming-Rong Fu
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
Backfill prevention system for gas flow conduit
Patent number
6,822,575
Issue date
Nov 23, 2004
Taiwan Semiconductor Manufacturing, Co., Ltd.
Wen-Ming Chen
G01 - MEASURING TESTING
Information
Patent Grant
Recipe comparison system
Patent number
6,745,142
Issue date
Jun 1, 2004
Taiwan Semiconductor Manufacturing Co., Ltd.
Ming-Rong Fu
G06 - COMPUTING CALCULATING COUNTING
Patents Applications
last 30 patents
Information
Patent Application
SEMICONDUCTOR METROLOGY SYSTEM AND METHOD
Publication number
20240193473
Publication date
Jun 13, 2024
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
Yun-Chung Teng
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
WAFER PROCESS CHAMBER LEAK DETECTOR
Publication number
20100248382
Publication date
Sep 30, 2010
Taiwan Semiconductor Manufacturing Company, Ltd.
George Lin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
AUTOMATIC METHODS AND SYSTEMS FOR MANUFACTURING RECIPE FEEDBACK CON...
Publication number
20070293968
Publication date
Dec 20, 2007
Taiwan Semiconductor Manufacturing Co., LTD
Ming-Rong Fu
G05 - CONTROLLING REGULATING
Information
Patent Application
Mechanism for synchronizing manafacturing information systems and d...
Publication number
20050228765
Publication date
Oct 13, 2005
Taiwan Semiconductor Manufacturing Co.
Chen-Chu Huang
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Backfill prevention system for gas flow conduit
Publication number
20040017297
Publication date
Jan 29, 2004
Taiwan Semiconductor Manufacturing Co., Ltd.
Wen-Ming Chen
G01 - MEASURING TESTING
Information
Patent Application
Recipe comparison system
Publication number
20020183950
Publication date
Dec 5, 2002
Ming-Rong Fu
G06 - COMPUTING CALCULATING COUNTING