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Ming Zhang
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Champaign, IL, US
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Patents Grants
last 30 patents
Information
Patent Grant
Parallel, individually addressable probes for nanolithography
Patent number
7,402,849
Issue date
Jul 22, 2008
The Board of Trustees of the University of Illinois
Chang Liu
G01 - MEASURING TESTING
Information
Patent Grant
Parallel, individually addressable probes for nanolithography
Patent number
6,867,443
Issue date
Mar 15, 2005
The Board of Trustees of the University of Illinois
Chang Liu
G01 - MEASURING TESTING
Information
Patent Grant
Parallel, individually addressable probes for nanolithography
Patent number
6,642,129
Issue date
Nov 4, 2003
The Board of Trustees of the University of Illinois
Chang Liu
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
Parallel, individually addressable probes for nanolithography
Publication number
20060082379
Publication date
Apr 20, 2006
The Board Trustees of the University of Illinois
Chang Liu
G01 - MEASURING TESTING
Information
Patent Application
Parallel, individually addressable probes for nanolithography
Publication number
20040119490
Publication date
Jun 24, 2004
The Board of trustees of the University of Illinois
Chang Liu
G01 - MEASURING TESTING
Information
Patent Application
Parallel, individually addressable probes for nanolithography
Publication number
20030022470
Publication date
Jan 30, 2003
The Board of trustees of the University of Illinois
Chang Liu
B82 - NANO-TECHNOLOGY