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Mingguang Li
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Sunnyvale, CA, US
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last 30 patents
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Patent Grant
Systems and methods for scanning a beam of light across a specimen
Patent number
6,775,051
Issue date
Aug 10, 2004
KLA Tencor Technologies
Jamie Sullivan
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
Systems and methods for scanning a beam of light across a specimen
Publication number
20020181119
Publication date
Dec 5, 2002
Jamie Sullivan
G01 - MEASURING TESTING