MingHang Wu

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Renton, WA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method for performing hot water seal on electrostatic chuck
- Patent number 9,054,148
- Issue date Jun 9, 2015
- Lam Research Corporation
- Hong Shih
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...

Patents Applicationslast 30 patents

Information Patent Application
SYSTEM AND METHOD FOR PERFORMING HOT WATER SEAL ON ELECTROSTATIC CHUCK
- Publication number 20150235889
- Publication date Aug 20, 2015
- LAM RESEARCH CORPORATION
- Hong Shih
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR PERFORMING HOT WATER SEAL ON ELECTROSTATIC CHUCK
- Publication number 20130052339
- Publication date Feb 28, 2013
- Hong Shih
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...