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Minghao Tang
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Ballston Lake, NY, US
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Patents Grants
last 30 patents
Information
Patent Grant
Self-referencing and self-calibrating interference pattern overlay...
Patent number
11,675,277
Issue date
Jun 13, 2023
KLA Corporation
Dongyue Yang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Self-referencing and self-calibrating interference pattern overlay...
Patent number
11,231,654
Issue date
Jan 25, 2022
GLOBALFOUNDRIES U.S. Inc.
Dongyue Yang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Structure and method to improve overlay performance in semiconducto...
Patent number
10,833,022
Issue date
Nov 10, 2020
GLOBALFOUNDRIES Inc.
Cung D. Tran
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Self-referencing and self-calibrating interference pattern overlay...
Patent number
10,705,435
Issue date
Jul 7, 2020
GLOBALFOUNDRIES Inc.
Dongyue Yang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Asymmetric overlay mark for overlay measurement
Patent number
10,707,175
Issue date
Jul 7, 2020
GLOBALFOUNDRIES Inc.
Wei Zhao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Structure and method to improve overlay performance in semiconducto...
Patent number
10,504,851
Issue date
Dec 10, 2019
GLOBALFOUNDRIES Inc.
Cung D. Tran
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Multiple patterning with mandrel cuts formed using a block mask
Patent number
10,395,926
Issue date
Aug 27, 2019
GLOBALFOUNDRIES Inc.
Minghao Tang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Interconnects with cuts formed by block patterning
Patent number
10,319,626
Issue date
Jun 11, 2019
GLOBALFOUNDRIES Inc.
Minghao Tang
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SELF-REFERENCING AND SELF-CALIBRATING INTERFERENCE PATTERN OVERLAY...
Publication number
20220334502
Publication date
Oct 20, 2022
Dongyue Yang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SELF-REFERENCING AND SELF-CALIBRATING INTERFERENCE PATTERN OVERLAY...
Publication number
20200241429
Publication date
Jul 30, 2020
GLOBALFOUNDRIES INC.
Dongyue Yang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
STRUCTURE AND METHOD TO IMPROVE OVERLAY PERFORMANCE IN SEMICONDUCTO...
Publication number
20200051923
Publication date
Feb 13, 2020
GLOBALFOUNDRIES INC.
Cung D. Tran
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ASYMMETRIC OVERLAY MARK FOR OVERLAY MEASUREMENT
Publication number
20190363053
Publication date
Nov 28, 2019
GLOBALFOUNDRIES INC.
Wei Zhao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
STRUCTURE AND METHOD TO IMPROVE OVERLAY PERFORMANCE IN SEMICONDUCTO...
Publication number
20190267329
Publication date
Aug 29, 2019
GLOBALFOUNDRIES INC.
Cung D. Tran
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SELF-REFERENCING AND SELF-CALIBRATING INTERFERENCE PATTERN OVERLAY...
Publication number
20190219930
Publication date
Jul 18, 2019
GLOBALFOUNDRIES INC.
Dongyue Yang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
INTERCONNECTS WITH CUTS FORMED BY BLOCK PATTERNING
Publication number
20190181040
Publication date
Jun 13, 2019
GLOBALFOUNDRIES INC.
Minghao Tang
H01 - BASIC ELECTRIC ELEMENTS